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Kazuhiro Minagawa

Sumitomo Metal Industries

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Publication

Featured researches published by Kazuhiro Minagawa.

Archive | 1994

Process for preparing a silicon carbide sintered body for use in semiconductor equipment

Shoichi Kojima; Kazuhiro Minagawa; Haruyuki Kano; Tadaaki Miyazaki; Hiroaki Wada

Archive | 1993

Process for producing silicon carbide-base complex

Tadahisa Arahori; Shigetoshi Hayashi; Kazuhiro Minagawa

Archive | 1991

Production of silicon carbide powder for semiconductor jig

Haruyuki Kano; Soichi Kojima; Ikuo Kurachi; Kazuhiro Minagawa; Tasuku Saito; 育夫 倉地; 荘一 小島; 翼 斉藤; 治之 狩野; 和弘 皆川

Archive | 1992

Process for preparing silicon carbide powder for use in semiconductor equipment

Shoichi Kojima; Kazuhiro Minagawa; Tasuku Saito; Tasuo Kurachi; Haruyuki Kano

Archive | 2000

Heat treatment method for synthetic quartz glass

Kensuke Fukushima; Makoto Kitada; Kazuhiro Minagawa; 信 北田; 和弘 皆川; 謙輔 福島

Archive | 2000

QUARTZ GLASS EXCELLENT IN TRANSMISSION OF SHORT WAVELENGTH LIGHT, AND ITS PRODUCTION

Osamu Doi; Kensuke Fukushima; Kazuhiro Minagawa; 理 土居; 和弘 皆川; 謙輔 福島

Archive | 1994

Method of cleaning semiconductor treating jigs

Tadahisa Arahori; Kazuhiro Minagawa; 和弘 皆川; 忠久 荒堀

Archive | 1993

PROCEDE DE PREPARATION DE POUDRE DE CARBURE DE SILICIUM EN VUE DE SON UTILISATION DANS DES EQUIPEMENTS SEMI-CONDUCTEURS.

Shoichi Kojima; Kazuhiro Minagawa; Tasuku Saito; Yasuo Kurachi; Haruyuki Kano

Archive | 1992

Verfahren zur herstellung eines (beta)-siliciumcarbidpulvers und halbleiterbauelement-herstellungseinrichtung Process for the preparation of a (beta) and -siliciumcarbidpulvers semiconductor component manufacturing apparatus

Shoichi Kojima; Kazuhiro Minagawa; Tasuku Saito; Yasuo Kurachi; Haruyuki Kano

Archive | 1992

Verfahren zur Herstellung eines β-Siliciumcarbidpulvers und dessen Verwendung für Halbleiterbauelement-Herstellungseinrichtungen A process for preparing a β-silicon carbide powder and its use for semiconductor device manufacturing facilities

Haruyuki Kano; Shoichi Kojima; Yasuo Kurachi; Kazuhiro Minagawa; Tasuku Saito

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Haruyuki Kano

Sumitomo Metal Industries

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Shoichi Kojima

Sumitomo Metal Industries

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Tasuku Saito

Bridgestone

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Yasuo Kurachi

Bridgestone

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Tadahisa Arahori

Sumitomo Metal Industries

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Shigetoshi Hayashi

Sumitomo Metal Industries

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Hiroaki Wada

Sumitomo Metal Industries

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Tadaaki Miyazaki

Sumitomo Metal Industries

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Tasuo Kurachi

Sumitomo Metal Industries

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