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Kazumasa Wakiya

NEC

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Publication

Featured researches published by Kazumasa Wakiya.

Archive | 2012

Substrate treatment method

Masahito Tanabe; Kazumasa Wakiya; Masakazu Kobayashi; Toshimasa Nakayama

Archive | 2004

Immersion exposure process-use resist protection film forming material, composite film, and resist pattern forming method

Taku Hirayama; Ryoichi Takasu; Mitsuru Sato; Kazumasa Wakiya; Masaaki Yoshida; Koki Tamura

Archive | 1996

Remover solution composition for resist and method for removing resist using the same

Masahito Tanabe; Kazumasa Wakiya; Masakazu Kobayashi; Toshimasa Nakayama

Archive | 2002

Photoresist stripping solution and a method of stripping photoresists using the same

Shigeru Yokoi; Kazumasa Wakiya

Archive | 1996

Photoresist stripping liquid compositions and a method of stripping photoresists using the same

Masahito Tanabe; Kazumasa Wakiya; Masakazu Kobayashi; Toshimasa Nakayama

Archive | 2003

Method for removing photoresist

Shigeru Yokoi; Kazumasa Wakiya; Takayuki Haraguchi

Archive | 1997

Process for treating a lithographic substrate and a rinse solution for the treatment

Masahito Tanabe; Kazumasa Wakiya; Masakazu Kobayashi; Toshimasa Nakayama

Archive | 2004

Material for forming resist-protecting film for immersion exposure process, resist-protecting film made of such material, and method for forming resist pattern using such resist-protecting film

Taku Hirayama; Kotaro Endo; Masaaki Yoshida; Kazumasa Wakiya

Archive | 1995

Removing solution composition for resist

Masaichi Kobayashi; Toshimasa Nakayama; Masahito Tanabe; Kazumasa Wakiya; 寿昌 中山; 政一 小林; 将人 田辺; 和正 脇屋

Archive | 2000

Photoresist stripping solution and a method of stripping photoresists with the same

Kazumasa Wakiya; Masakazu Kobayashi

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Shigeru Yokoi

Intel

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Masahito Tanabe

NEC

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Masakazu Kobayashi

NEC

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Yoshihiro Sawada

Oki Electric Industry

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Takayuki Haraguchi

Intel

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Mitsuru Sato

Takeda Pharmaceutical Company

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Taku Hirayama

University of Tokyo

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Hiroshi Komano

NEC

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Hidemitsu Aoki

NEC

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Kenichi Nakabeppu

NEC

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