Kazumichi Ogura

New Methods for Cross-Section Sample Preparation Using Broad Argon Ion Beam

In 2006, we introduced a new specimen preparation apparatus, Cross-section Polisher (CP), which employs a broad argon ion beam to prepare cross-sections of specimens [1-2]. The principle of the CP is simple: a region of the specimen that is not covered by the masking plate is milled by an argon broad ion beam, as shown in Fig.1. The specimens with irregular shapes and rough surfaces that cannot be embedded prior to ion milling require additional care and consideration prior to ion-milling with CP.

Application of the high resolution SEM to the fine structure study of polyethylene

Abstract To examine the applicability of high resolution scanning electron microscopy to the field of fine structure study of polymers, a fine lamellar structure on the melt extruded polyethylene films has been observed using four types of commercially available SEM; (a) usual surface SEM with a tungsten hairpin cathode gun, (b) TEMSCAN type SEM with a tungsten hairpin cathode gun, (c) FESEM with a cold type field emission gun, and (d) TEMSCAN with a LaB6 cathode gun. A fine lamellar crystal of 10nm in thickness, which is composed of folded molecular chains and exists on polymer block surfaces, has been hitherto observable only by the replication technique. SEMs of type (a) and (b) can resolve the lamellar stacks but not a single lamella. The single sheet of lamella is observable with the SEMs of type (c) and (d) as a step on the crystal surface. These high resolution SEM images are compared with that of replicas and their merits are discussed.

Scanning Electron Microscope Observations of As^+-Ion-Implanted Region

Lateral and depth profiles of the ion-implanted region were first observed using cleaved cross-sectional scanning electron microscope. The amorphous region induced by ion bombardment appears dark relative to the crystalline region. It is found that the secondary electrons, as well as the backscattered ones, are influenced by the so-called channeling effect.