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Dive into the research topics where Kazuto Ikeda is active.

Publication


Featured researches published by Kazuto Ikeda.


Archive | 1993

Method and equipment for sensing position wafer in boat

Eiji Hosaka; Kazuto Ikeda; Hideki Kaihatsu; Kazuhiro Shino; Hisashi Yoshida; 英二 保坂; 久 吉田; 和人 池田; 和弘 示野; 秀樹 開発


Archive | 1996

Method for teaching substrate-mounted machine

Kazuto Ikeda; Takeshi Sugimoto; Yuji Yoshida; Yukinori Yuya; 祐治 吉田; 毅 杉本; 和人 池田; 幸則 油谷


Archive | 1993

Vertical reactive furnace

Eiji Hosaka; Kazuto Ikeda; Hideki Kaihatsu; Seiji Watanabe; Hisashi Yoshida; 英二 保坂; 久 吉田; 和人 池田; 誠治 渡辺; 秀樹 開発


Archive | 2009

Position management device for movable shaft

Kazuto Ikeda; Isao Kita; Takayuki Kusabe; Katsuhiro Masuda; Koji Shirasaki; 功 喜多; 勝弘 増田; 和人 池田; 晃治 白▲崎▼; 孝行 草部


Archive | 1999

Device for carrying object to be processed and semiconductor manufacturing device and method for processing the object to be processed

Kazuto Ikeda; Shinichiro Watabiki; Hisashi Yoshida; Yukinori Yuya; 久 吉田; 和人 池田; 幸則 油谷; 真一郎 綿引


Archive | 1997

Semiconductor manufacturing equipment and method for correcting substrate position deviation in the equipment

Kazuto Ikeda; Hideo Shimura; Takeshi Sugimoto; Shinichiro Watabiki; Shuji Yonemitsu; Hisashi Yoshida; Yuji Yoshida; Yukinori Yuya; 久 吉田; 祐治 吉田; 日出男 志村; 毅 杉本; 和人 池田; 幸則 油谷; 修司 米満; 真一郎 綿引


Archive | 1993

Cooling device for furnace housing section of semiconductor manufacturing device

Eiji Hosaka; Kazuto Ikeda; Riichi Kano; Hisashi Yoshida; 英二 保坂; 久 吉田; 和人 池田; 利一 狩野


Archive | 1993

Aligning device for notch of wafer

Kazuto Ikeda; Hideki Kaihatsu; Riichi Kano; 和人 池田; 利一 狩野; 秀樹 開発


Archive | 1993

Wafer cassette loading-unloading equipment

Kazuto Ikeda; Hideki Kaihatsu; Riichi Kano; Tetsuo Yamamoto; 哲夫 山本; 和人 池田; 利一 狩野; 秀樹 開発


Archive | 1996

Gas purge box

Kazuto Ikeda; Takeshi Ito; 伊藤 剛; 和人 池田

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Yuji Yoshida

University of Kitakyushu

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