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Featured researches published by Kazutoshi Watanabe.


Journal of Applied Physics | 2005

Thermal and optical properties of bulk GaN crystals fabricated through hydride vapor phase epitaxy with void-assisted separation

Yuichi Oshima; Takayuki Suzuki; Takeshi Eri; Yusuke Kawaguchi; Kazutoshi Watanabe; Masatomo Shibata; Tomoyoshi Mishima

The fundamental material parameters associated with GaN, which are important for the design of devices such as light-emitting diodes and laser diodes, were investigated using large high-quality GaN single crystals fabricated through hydride vapor phase epitaxy using the void-assisted separation method. The thermal-expansion coefficients (298–573K) along the C[0001], A[112¯0], and M[101¯0] axes (αC, αA, and αM) were measured. Thermal expansion in each direction, approximately proportional to the temperature, was observed throughout the measured temperature range. Although the thermal-expansion coefficients in the high-temperature range, i.e., αC(573K)=7.2±0.02×10−6∕K, αA(573K)=5.7±0.2×10−6∕K, and αM(573K)=5.8±0.2×10−6∕K,were relatively close to the reported values, the thermal-expansion coefficients along the C axis in the low-temperature range, i.e., αC(298K)=5.3±0.02×10−6∕K, was significantly larger than the reported values. Thermal conductivities parallel and perpendicular to the C axis were almost the ...


Archive | 2010

Freestanding GaN Wafers by Hydride Vapor Phase Epitaxy Using Void-Assisted Separation Technology

Yuichi Oshima; Takehiro Yoshida; Takeshi Eri; Kazutoshi Watanabe; Masatomo Shibata; Tomoyoshi Mishima

An outline is presented of the fabrication technique of freestanding GaN wafers by hydride vapor phase epitaxy using the void-assisted separation method and the properties of resulting crystals. A thick GaN layer of large area can be separated with excellent reproducibility from a base substrate by the application of thermal stress. This process is assisted by numerous voids formed near the interface between the thick GaN layer and the base substrate. By using this method, high-quality GaN wafers of large area with diameters of over 3 in. have been prepared.


Japanese Journal of Applied Physics | 2012

Evaluation of Crystal Orientation for (K,Na)NbO3 Films Using X-ray Diffraction Reciprocal Space Map and Relationship between Crystal Orientation and Piezoelectric Coefficient

Kenji Shibata; Kazufumi Suenaga; Kazutoshi Watanabe; Fumimasa Horikiri; Tomoyoshi Mishima; Masaharu Shiratani

We have found an effective method for the evaluation of the crystal orientation of (K,Na)NbO3 (KNN) films in the (K,Na)NbO3/Pt/Ti/SiO2/Si structure using X-ray diffraction (XRD) reciprocal space maps. Previously, the crystal structure and orientation of such (K,Na)NbO3 films were evaluated using 2θ/θ XRD, and were considered to be the pseudocubic perovskite structure with preferential (001) orientation and no (111) orientation. Here, we applied the new method using XRD reciprocal space maps, and discovered that the (K,Na)NbO3 films had some degree of KNN(111) orientation. We calculated the KNN(001)- and KNN(111)-orientation volume fractions for the (K,Na)NbO3 films from the (101) diffraction peaks originating from the KNN(001)- and KNN(111)-orientation elements in the XRD reciprocal space maps, considering the calibration factors obtained from pole-figure simulations, and examined the relationship between the crystal orientation and d31 piezoelectric coefficient in the (K,Na)NbO3 films. The results indicated that the d31 piezoelectric coefficient increases with increasing (001)-orientation volume fraction.


Journal of Crystal Growth | 2008

Fabrication of 3-in GaN substrates by hydride vapor phase epitaxy using void-assisted separation method

Takehiro Yoshida; Yuichi Oshima; Takeshi Eri; Ken Ikeda; Shunsuke Yamamoto; Kazutoshi Watanabe; Masatomo Shibata; Tomoyoshi Mishima


Archive | 2011

Piezoelectric thin-film element and piezoelectric thin-film device

Kenji Shibata; Kazufumi Suenaga; Akira Nomoto; Kazutoshi Watanabe


Physica Status Solidi (c) | 2011

Ultrahigh‐speed growth of GaN by hydride vapor phase epitaxy

Takehiro Yoshida; Yuichi Oshima; Kazutoshi Watanabe; Tadayoshi Tsuchiya; Tomoyoshi Mishima


Journal of Crystal Growth | 2010

Properties of Ge-doped, high-quality bulk GaN crystals fabricated by hydride vapor phase epitaxy

Yuichi Oshima; Takehiro Yoshida; Kazutoshi Watanabe; Tomoyoshi Mishima


Archive | 2013

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

Kazufumi Suenaga; Kenji Shibata; Kazutoshi Watanabe; Akira Nomoto; Fumimasa Horikiri


Physica Status Solidi (a) | 2008

Preparation of 3 inch freestanding GaN substrates by hydride vapor phase epitaxy with void-assisted separation

Takehiro Yoshida; Yuichi Oshima; Takeshi Eri; Kazutoshi Watanabe; Masatomo Shibata; Tomoyoshi Mishima


Archive | 2012

Manufacturing method of piezoelectric film element, piezoelectric film element and piezoelectric device

Fumimasa Horikiri; Kenji Shibata; Kazufumi Suenaga; Kazutoshi Watanabe; Akira Nomoto

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