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Kazuya Ota

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Publication

Featured researches published by Kazuya Ota.

Archive | 1996

LIGHT-EXPOSURE DEVICE AND LIGHT-EXPOSURE METHOD

Kazuya Ota; 和哉 太田

Archive | 1999

Projection aligner, exposure method, and device- manufacturing method

Kazuya Ota; 和哉 太田

Archive | 1998

Production of mask

Kazuya Ota; 和哉 太田

Archive | 1998

Aligner and method of exposure

Kazuya Ota; 和哉 太田

Archive | 2001

RETICLE, ALIGNER USING THE SAME AND EXPOSURE METHOD

Kazuya Ota; 和哉 太田

Archive | 2003

Pattern transfer mask, method for manufacturing mask and exposure method

Kazuya Ota; 和哉 太田

Archive | 1996

Exposure requirement measuring method

Kazuya Ota; 和哉 太田

Archive | 1992

Method and equipment for position detection

Kazuya Ota; 和哉 太田

Archive | 1998

SCAN TYPE ALIGNER AND METHOD THEREOF

Kazuya Ota; 和哉 太田

Archive | 1995

Method for controlling movement of substrate stage of aligner and device

Kazuya Ota; 和哉 太田

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