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Keiichi Okabe

East Tennessee State University

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Publication

Featured researches published by Keiichi Okabe.

Archive | 2001

Production method for silicon wafer and SOI wafer, and SOI wafer

Takao Abe; Tokio Takei; Keiichi Okabe; Hajime Miyajima

Archive | 1999

Semiconductor wafer and production method therefor

Tadahiro Kato; Sadayuki Okuni; Shunichi Ikeda; Keiichi Okabe; Hisashi Oshima

Archive | 2006

Method for manufacturing bonded wafer and outer-peripheral grinding machine of bonded wafer

Susumu Miyazaki; Tokio Takei; Keiichi Okabe

Archive | 1999

Manufacturing process for semiconductor wafer

Tadahiro Kato; Sadayuki Okuni; Keiichi Okabe; Hisashi Oshima

Archive | 1999

Surface grinding method and apparatus for thin plate work

Keiichi Okabe; Hisashi Oshima; Sadayuki Okuni; Tadahiro Kato

Archive | 2001

Silicon wafer, manufacturing method of laminated wafer and laminated wafer thereof

Takao Abe; Hajime Miyajima; Keiichi Okabe; Tokio Takei; 元 宮島; 啓一 岡部; 時男 武井; 孝夫 阿部

Archive | 1998

Surface form measuring device of semiconductor substrate and surface form measuring method of semiconductor substrate

Noriaki Kubota; Keiichi Okabe; 憲章 久保田; 啓一 岡部

Archive | 1998

SEMICONDUCTOR WAFER AND MANUFACTURE THEREOF

Shunichi Ikeda; Tadahiro Kato; Keiichi Okabe; Yoshiyuki Okuni; Hisashi Oshima; 忠弘 加藤; ▲禎▼之 大國; 久 大嶋; 啓一 岡部; 俊一 池田

Archive | 1995

Fabrication of semiconductor wafer

Tadahiro Kato; Keiichi Okabe; Yoshiyuki Okuni; Hisashi Oshima; 忠弘 加藤; ▲禎▼之 大國; 久 大嶋; 啓一 岡部

Archive | 2006

Method for evaluating semiconductor wafer, apparatus for evaluating semiconductor wafer, and method for manufacturing semiconductor wafer

Keiichi Okabe; Hisakazu Takano; Daisuke Nakamata

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Tokio Takei

East Tennessee State University

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Hisashi Oshima

East Tennessee State University

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Susumu Miyazaki

East Tennessee State University

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Tadahiro Kato

East Tennessee State University

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Sadayuki Okuni

East Tennessee State University

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Takao Abe

East Tennessee State University

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Shunichi Ikeda

East Tennessee State University

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Daisuke Nakamata

East Tennessee State University

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Hisakazu Takano

East Tennessee State University

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Noriaki Kubota

East Tennessee State University

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