Keisuke Koga
Panasonic
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Publication
Featured researches published by Keisuke Koga.
Microelectronic Engineering | 1990
Noboru Nomura; H. Nakagawa; Yoshiyuki Tani; Keisuke Koga; Nobuhiro Araki; Takeo Sato; Masaru Sasago
Abstract A 5X aspherical refractive lens with 60% transmittance at 193 nm wavelength was successfully designed by decreasing the thickness of the lens material. An ArF excimer laser lithographic tool was constructed by the same concept as KrF excimer laser stepper except an aspherical lens was used to demonstrate 0.25 μ m resolution. 0.25 μ m line and space patterns could be resolved using 0.5 μ m thick PMMA.
Archive | 1987
Nobuhiro Araki; Takeo Sato; Koichi Kawata; Noboru Nomura; Keisuke Koga
Archive | 2000
Masahiro Deguchi; Makoto Kitabatake; Kanji Imai; Tomohiro Sekiguchi; Hideo Kurokawa; Keisuke Koga; Tetsuya Shiratori; Toru Kawase
Archive | 1988
Takeo Sato; Shinichiro Aoki; Katsumasa Yamaguchi; Tadashi Kaneko; Noboru Nomura; Keisuke Koga; Kazuhiro Yamashita
Archive | 2001
Toru Kawase; Keisuke Koga
Archive | 2000
Masahiro Deguchi; Makoto Kitabatake; Kanji Imai; Tomohiro Sekiguchi; Hideo Kurokawa; Keisuke Koga; Tetsuya Shiratori; Toru Kawase
Archive | 1994
Yoshikazu Hori; Keisuke Koga
Archive | 1997
Keisuke Koga; Kiyoyuki Morita
Archive | 2009
Makoto Yamamoto; Keisuke Koga
Archive | 2003
Keisuke Koga; Toru Kawase; Kenichi Honda; Tetsuya Norikane
