Keith J. Hansen | Researchain

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Publication

Featured researches published by Keith J. Hansen.

Archive | 1991

Tungsten deposition process for low contact resistivity to silicon

Keith J. Hansen

Archive | 1991

Method for performing in-situ etch of a CVD chamber

Keith J. Hansen

Archive | 1997

In-situ etch of CVD chamber

Keith J. Hansen

Archive | 1992

Structure for filtering CVD chamber process gases

Keith J. Hansen

Archive | 1989

Remote measurement of temperature

Paul Poenisch; Keith J. Hansen

Archive | 2001

Structure for filtering process gases for use with a chemical vapour deposition chamber

Keith J. Hansen

Archive | 1997

Filtering technique for CVD chamber process gases

Keith J. Hansen

Archive | 2000

Purging gas control structure for CVD chamber

Keith J. Hansen

Archive | 1990

Apparatus for conducting a refractory metal deposition process

Keith J. Hansen

Archive | 1997

Gas control technique for limiting surging of gas into a CVD chamber

Keith J. Hansen

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LSI Corporation

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