Kempf Stefan

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Archive | 1997

Vorrichtung zum Greifen und Halten eines flachen Substrats

Reising Michael; Kempf Stefan; Koenig Michael

Archive | 1990

Lock chamber for substrate

Kempf Stefan; Zejda Jaroslav

Archive | 1989

VORRICHTUNG NACH DEM KARUSSELL-PRINZIP ZUM BESCHICHTEN VON SUBSTRATEN

Anderle Friedrich; Costescu Dan Lucian; Kempf Stefan; Novak Emmerich; Zejda Jaroslav

Archive | 2007

Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung

Kempf Stefan; Roth Georg; Sichmann Eggo

Archive | 1999

Vorrichtung und Verfahren zum Verkleben von zwei Substratteilen zu einem Substrat, insbesondere zu einem optischen Datenträger (CD)

Sichmann Eggo; Gerigk Reinhard; Kempf Stefan

Archive | 1998

Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber

Reising Michael; Kempf Stefan

Archive | 1996

Substrate hold and release mechanism for vacuum chamber

Kempf Stefan; Reising Michael

Archive | 2002

Evacuating device comprises a high vacuum pump for evacuating a second chamber, and a one-stage fore-vacuum pump for evacuating a first chamber and for producing a fore-vacuum for the high vacuum pump

Kempf Stefan; Roth Georg; Sichmann Eggo

Archive | 2002

Device for placing and removing masks on/from a substrate during coating of CDs or halves of DVDs comprises a vacuum sluice having a lid and a support for the substrate

Reisig Michael; Kempf Stefan

Archive | 1999

Bonding component discs to form digital versatile disc

Kempf Stefan; Gerigk Reinhard; Rueth Edgar

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Singulus Technologies

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot

Dive into the research topics where Kempf Stefan is active.

Publication

Featured researches published by Kempf Stefan.

Vorrichtung zum Greifen und Halten eines flachen Substrats

Lock chamber for substrate

VORRICHTUNG NACH DEM KARUSSELL-PRINZIP ZUM BESCHICHTEN VON SUBSTRATEN

Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung

Vorrichtung und Verfahren zum Verkleben von zwei Substratteilen zu einem Substrat, insbesondere zu einem optischen Datenträger (CD)

Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber

Substrate hold and release mechanism for vacuum chamber

Evacuating device comprises a high vacuum pump for evacuating a second chamber, and a one-stage fore-vacuum pump for evacuating a first chamber and for producing a fore-vacuum for the high vacuum pump

Device for placing and removing masks on/from a substrate during coating of CDs or halves of DVDs comprises a vacuum sluice having a lid and a support for the substrate

Bonding component discs to form digital versatile disc

Collaboration

Dive into the Kempf Stefan's collaboration.