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Ken Ebihara

Asahi Glass Co.

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Publication

Featured researches published by Ken Ebihara.

Archive | 2009

SUBSTRATE FOR EUV MASK BLANKS

Akio Koike; Ken Ebihara

Archive | 2008

Euv mask blank

Yoshiaki Ikuta; Ken Ebihara

Archive | 2007

Reflective-type mask blank for euv lithography

Yoshiaki Ikuta; Toshiyuki Uno; Ken Ebihara

Archive | 2011

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND MASK FOR EUV LITHOGRAPHY

Kazuyuki Hayashi; Toshiyuki Uno; Ken Ebihara

Archive | 2007

Method for smoothing a surface of a glass substrate, and substrate for a reflective mask blank used in EUV lithography, obtainable by that method

Toshiyuki Uno; Yoshiaki Ikuta; Mika Yokoyama; Ken Ebihara

Archive | 2006

Method for smoothing a surface of a glass substrate for a reflective mask blank used in EUV lithography

Toshiyuki Uno; Yoshiaki Ikuta; Mika Yokoyama; Ken Ebihara

Archive | 2014

ALUMINUM-MATERIAL ANODIZATION METHOD

Yusuke Seki; 雄輔 関; Ken Ebihara; 海老原 健

Archive | 2009

Ébauche de masque réflecteur pour lithographie euv

Kazuyuki Hayashi; 和幸 林; Toshiyuki Uno; 俊之 宇野; Ken Ebihara; 海老原 健

Archive | 2009

Ebauche de masque réfléchissant pour une lithographie euv et masque réfléchissant pour une lithographie euv

Kazuyuki Hayashi; 和幸 林; Toshiyuki Uno; 俊之 宇野; Ken Ebihara; 海老原 健

Archive | 2007

Ébauche de masque de type réfléchissante pour lithographie aux ultraviolets extrêmes

Yoshiaki Ikuta; Toshiyuki Uno; Ken Ebihara

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Toshiyuki Uno

SEMATECH

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Toshiyuki Uno

SEMATECH

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Kazuyuki Hayashi

Asahi Glass Co.

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Yoshiaki Ikuta

SEMATECH

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Yoshiaki Ikuta

SEMATECH

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Mika Yokoyama

Asahi Glass Co.

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Akio Koike

Asahi Glass Co.

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Yusuke Seki

Niigata University

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