Kenichi Hibino

Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts

In phase-shifting interferometry spatial nonuniformity of the phase shift gives a significant error in the evaluated phase when the phase shift is nonlinear. However, current error-compensating algorithms can counteract the spatial nonuniformity only in linear miscalibrations of the phase shift. We describe an error-expansion method to construct phase-shifting algorithms that can compensate for nonlinear and spatially nonuniform phase shifts. The condition for eliminating the effect of nonlinear and spatially nonuniform phase shifts is given as a set of linear equations of the sampling amplitudes. As examples, three new algorithms (six-sample, eight-sample, and nine-sample algorithms) are given to show the method of compensation for a quadratic and spatially nonuniform phase shift.

Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer

Wavelength-scanning interferometry permits the simultaneous measurement of variations in surface shape and optical thickness of a nearly parallel plate. Interference signals from both surfaces of the test plate can be separated in frequency space; however, these frequencies are shifted from the expected frequency by the refractive-index dispersion of the test plate and any nonlinearity that is due to wavelength scanning. Conventional Fourier analysis is sensitive to this detuning of the signal frequency and suffers from multiple-beam interference noise. We propose new wavelength-scanning algorithms that permit a large tolerance for dispersion of the test plate and nonlinearity of scanning. Two 19-sample algorithms that suppress multiple-interference noise up to the second order of the reflectance of the test plate are presented. Experimental results show that the variation in surface shape and optical thickness of a glass parallel plate of 250-mm diameter was measured with a resolution of 1-2 nm rms.

Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry.

In phase-shifting interferometry, many algorithms have been reported that suppress systematic errors caused by, e.g., nonlinear motion of the phase shifter and nonsinusoidal signal waveform. However, when a phase-shifting algorithm is designed to compensate for the systematic phase-shift errors, it becomes more susceptible to random noise and gives larger random errors in the measured phase. The susceptibility of phase-shifting algorithms to random noise is analyzed with respect to their immunity to phase-shift errors and harmonic components of the signal. It is shown that for the most common group of error-compensating algorithms for nonlinear phase shift, both random errors and the effect of high-order harmonic components of the signal cannot be minimized simultaneously. It is also shown that if an algorithm is designed to have extended immunity to nonlinear phase shift, simultaneous minimization becomes possible.

Wavelength-scanning interferometry of a transparent parallel plate with refractive-index dispersion.

Testing for flatness of an optical parallel plate in a Fizeau interferometer suffers from problems caused by multiple-beam interference noise. Each internal-reflection component can be separated from the signal by its modulation frequency in a wavelength-scanned interferometer; however, the frequency depends on the thickness and the refractive-index dispersion of the test plate and on the nonlinearity of the scanning source. With a new 19-sample wavelength-scanning algorithm we demonstrate the elimination of the reflection noise, the effect of the dispersion up to the second order of the reflectance of the test plate, and as the nonlinearity of the source. The algorithm permits large tolerance in the air-gap distance, thus making it somewhat independent of the thickness of the test plate. The minimum residual reflection noise with this algorithm for testing a glass plate is approximately lambda/600. Experimental results show that the front surface of the test plate was measured within 1 nm rms of its true shape over a 230-mm-diameter aperture.

Multiple-surface interferometry of highly reflective wafer by wavelength tuning.

The surface shape and optical thickness variation of a lithium niobate (LNB) wafer were measured simultaneously using a wavelength-tuning interferometer with a new phase-shifting algorithm. It is necessary to suppress the harmonic signals for testing a highly reflective sample such as a crystal wafer. The LNB wafer subjected to polishing, which is in optical contact with a fused-silica (FS) supporting plate, generates six different overlapping interference fringes. The reflectivity of the wafer is typically 15%, yielding significant harmonic signals. The new algorithm can flexibly select the phase-shift interval and effectively suppress the harmonic signals and crosstalk. Experimental results indicated that the optical thickness variation of the LNB wafer was measured with an accuracy of 2 nm.

Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelength-shifting interferometry

The interferometric surface measurement of single or stacked parallel plates presents considerable technical difficulties due to multiple-beam interference. To apply phase-shifting methods, it is necessary to use a pathlength-dependent technique such as wavelength scanning, which separates interference signals from various surfaces in frequency space. The detection window for frequency analysis has to be optimized for maximum tolerance against frequency detuning due to material dispersion and scanning nonlinearities, as well as for suppression of noise from other frequencies. We introduce a new class of phase-shifting algorithms that fulfill these requirements and allow continuous tuning of phase detection to any frequency of interest. We show results for a four-surface stack of nearparallel plates, measured in a Fizeau interferometer.

Design of phase shifting algorithms: fringe contrast maximum

In phase shifting interferometry, the fringe contrast is preferred to be at a maximum when there is no phase shift error. In the measurement of highly-reflective surfaces, the signal contrast is relatively low and the measurement would be aborted when the contrast falls below a threshold value. The fringe contrast depends on the design of the phase shifting algorithm. The condition for achieving the fringe contrast maximum is derived as a set of linear equations of the sampling amplitudes. The minimum number of samples necessary for constructing an error-compensating algorithm that is insensitive to the jth harmonic component and to the phase shift error is discussed. As examples, two new algorithms (15-sample and (3N - 2)-sample) were derived that are useful for the measurement for highly-reflective surfaces.

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

In phase-shifting Fizeau interferometers, the phase-shift error and multiple-beam interference are the most common sources of systematic error affecting high-precision phase measurements. The nonsinusoidal waveforms can be minimized by applying synchronous detection with more than 4-sample. However, when the phase-shift calibration is inaccurate, these algorithms cannot eliminate the effects of nonsinusoidal characteristics. Moreover, when measuring the surface profile of highly reflective samples, the calculated phase is critically determined not only by the decrease in the fringe contrast but also by the coupling error between the harmonics and phase-shift error. In this paper, the phase errors calculated by conventional phase-shifting algorithms were estimated by considering the coupling error. We show that the 4N−3 algorithm, comprising the polynomial window function and the DFT term, has the smallest phase error among the conventional phase-shifting algorithms. The surface profile of the highly reflective silicon wafer was measured using a wavelength-tuning Fizeau interferometer and the 4N−3 algorithm.

Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function

In this study, a 6N - 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate with suppression of the coupling errors between the higher harmonics and phase shift error. The characteristics of the 6N - 5 algorithm were estimated by connection with the Fourier representation in the frequency domain. The phase error of the measurements performed using the 6N - 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N - 5 algorithm and a wavelength tuning interferometer.

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity

Wavelength-tuning interferometry can measure surface shapes with discontinuous steps using a unit of synthetic wavelength that is usually larger than the step height. However, measurement resolution decreases for large step heights since the synthetic wavelength becomes much larger than the source wavelength. The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements. Systematic errors caused by nonlinearity in source frequency scanning are fully corrected by a correlation analysis between the observed and calculated interference fringes. Experiment results demonstrate that the determination of absolute interference order gives the profile of a surface with a step height of 1 mm with an accuracy of 12 nm.