Kenichi Makino

High-response X-Y stage system driven by in-parallel linear motors

Abstract We present our newly developed high-response XY stage system driven by in-parallel linear motors. Briefly described are operational principles, associated mechanical and control system design based on analysis of stage dynamics, and typical results of system performance experiments. Stepping motion with high-response and accurate positioning was obtained by incorporating a force disturbance observer and jerk-continuous trajectory generation into a conventional control system operated under PID and acceleration feedforward compensation. Measurements of stage stepping motion demonstrate a highly suitable design, e.g., in response to 2.54-mm step-motion command, positioning error was reduced to ±10 μm in just 37 ms.