Kenichiro Yamanishi
Mitsubishi
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Publication
Featured researches published by Kenichiro Yamanishi.
Journal of Vacuum Science and Technology | 1996
Kenji Hiramatsu; Hiroshi Ohnishi; Toru Takahama; Kenichiro Yamanishi
Polycrystalline TiN films containing less than 1 at. % of Cl contamination were formed from TiCl4 at a low temperature (200 °C) condition on a Si substrate by pulsed plasma chemical vapor deposition. The Cl suppression at low temperature was realized by a two‐step process, TiCl4 decomposition and hydrogen reduction. The main objective for reducing Cl in the film was to establish a sufficient reduction period to free TiClx radicals in the gas phase. The length of the reduction period was affected by the radio frequency power, which decided the rate of TiCl4 decomposition and hydrogen reduction.
Archive | 1987
Hisashi Tsukazaki; Kenichiro Yamanishi; Seiji Yasunaga
Archive | 1996
Yoshimi Kinoshita; Tomoyuki Kanda; Katsuhisa Kitano; Kazuo Yoshida; Hiroshi Ohnishi; Kenichiro Yamanishi; Shigeo Sasaki; Hideki Komori; Taizo Eshima; Kouichirou Tsutahara; Toshihiko Noguchi; Toru Takahama; Yoshihiko Kusakabe; Takeshi Iwamoto; Nobuyuki Kosaka
Archive | 1994
Kenji Hiramatsu; Tomoyuki Kanda; Yoshimi Kinoshita; Katsuhisa Kitano; Yoshihiko Kusakabe; Toshihiko Noguchi; Hiroshi Onishi; Toru Takahama; Kouichirou Tsutahara; Kenichiro Yamanishi; Kazuo Yoshida; 勝久 北野; 和夫 吉田; 寛 大西; 健一郎 山西; 健司 平松; 儀美 木之下; 智幸 神田; 嘉彦 草壁; 晃一郎 蔦原; 利彦 野口; 亨 高浜
Archive | 1990
Hisashi Tsukazaki; Kenichiro Yamanishi; Seiji Yasunaga
Archive | 1992
Hisashi Tsukazaki; Kenichiro Yamanishi
Archive | 1990
Masaaki Tanaka; Akira Ikeda; Toshiaki Kobayashi; Kenichiro Yamanishi; Shinichi Inoue; Shigeki Nakayama
Archive | 1990
Masaaki Tanaka; Akira Ikeda; Toshiaki Kobayashi; Kenichiro Yamanishi; Shinichi Inoue; Shigeki Nakayama
Archive | 1993
Taizo Ejima; Takeshi Iwamoto; Tomoyuki Kanda; Yoshimi Kinoshita; Katsuhisa Kitano; Hideki Komori; Noriyuki Kosaka; Yoshihiko Kusakabe; Toshihiko Noguchi; Hiroshi Onishi; Shigeo Sasaki; Susumu Takahama; Kouichirou Tsutahara; Kenichiro Yamanishi; Kazuo Yoshida; 茂雄 佐々木; 勝久 北野; 秀樹 古森; 和夫 吉田; 寛 大西; 宣之 小坂; 健一郎 山西; 猛 岩本; 儀美 木之下; 泰蔵 江島; 智幸 神田; 嘉彦 草壁; 晃一郎 蔦原; 利彦 野口; 享 高浜
Japanese Journal of Applied Physics | 1997
Yoshihiko Kusakabe; Ken-ichi Hanaoka; Hideki Komori; Hiroshi Ohnishi; Kenichiro Yamanishi
