Kenji Amaya

145 Aberration Retrieval Method using spot images with astigmatism offset

In this study, aberration retrieval method from spot images with astigmatism offset has been developed. The amplitude of the generalized pupil function and the wavefront aberration which is the phase of the generalized pupil function are expanded with the lower Zernike polynomials, respectively. The present aberration retrieval problem is reduced to the nonlinear least square problem minimizing the difference between the observed images on the imaging device and the corresponding model images which can be calculated by assuming these Zernike coefficients. In the mathematical model for calculating the captured spot images, the mathematical model considering the characteristics of the imaging device are applied to the current model. In order to demonstrate the effectiveness of this method, the numerical verification simulation and the aberration retrieval form practically captured images are performed.