Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Kenji Kamei is active.

Publication


Featured researches published by Kenji Kamei.


Archive | 2002

Substrate processing system managing apparatus information of substrate processing apparatus

Toru Kitamoto; Kenji Kamei; Hidekazu Inoue; Tetsuya Hamada


Archive | 1997

Periphery exposing apparatus and method

Kazuya Akiyama; Kenji Kamei; Satoshi Yamamoto


Archive | 1993

Apparatus for detecting position of a notch in a semiconductor wafer

Satoshi Yamamoto; Kenji Kamei


Archive | 1998

Substrate processing apparatus having regulated power consumption and method therefor

Akihiko Morita; Masami Ohtani; Yasuo Imanishi; Masao Tsuji; Masaki Iwami; Joichi Nishimura; Kazuhiro Nishimura; Tetsuya Hamada; Satoshi Yamamoto; Kenji Kamei


Archive | 2001

Substrate processing system, substrate processor, device information management method, program and recording medium

Tetsuya Hamada; Hidekazu Inoue; Kenji Kamei; Toru Kitamoto; 謙治 亀井; 秀和 井上; 徹 北本; 哲也 濱田


Archive | 2005

Substrate heat treatment apparatus and substrate temperature measuring method

Kenji Kamei; Hiroshi Kurusu; 謙治 亀井; 宏 来栖


Archive | 2002

FILM THICKNESS MEASURING APPARATUS AND METHOD, AND SUBSTRATE TREATING UNIT AND METHOD

Kenji Kamei; Kensho Yokono; 謙治 亀井; 憲昭 横野


Archive | 2001

SUBSTRATE-PROCESSING SYSTEM, SUBSTRATE-PROCESSING APPARATUS MANAGING METHOD, SUBSTRATE-PROCESSING APPARATUS, PROGRAM AND STORAGE MEANS

Tetsuya Hamada; Hidekazu Inoue; Kenji Kamei; Toru Kitamoto; 謙治 亀井; 秀和 井上; 徹 北本; 哲也 濱田


Archive | 2004

Edge exposing apparatus

Kazuya Akiyama; Kenji Kamei; Kazuya Ono


Archive | 2007

Substrate processing system, substrate processor, program, and recording medium

Tetsuya Hamada; Hidekazu Inoue; Kenji Kamei; Toru Kitamoto; 謙治 亀井; 秀和 井上; 徹 北本; 哲也 濱田

Collaboration


Dive into the Kenji Kamei's collaboration.

Researchain Logo
Decentralizing Knowledge