Network
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Publication
Featured researches published by Kenji Sakai.
international symposium on semiconductor manufacturing | 1999
Kenji Sakai; Toshiroh Karaki Doy; M.M. Touzov; Manaliu Satoh; Toshio Kasai
This study presents the development of a novel air-back polishing carrier with an integrated Linear Variable Differential Transformer Endpoint Detector (LVDT EPD). In the course of this study, uniformity evaluation was performed on blanket PETEOS oxide and blanket copper wafers and dishing/erosion multi-step polish on patterned wafers. Employment of an air-back polishing carrier resulted in non-uniformity <3% 1/spl sigma/. The LVDT EPD showed an excellent S/N ratio. The combination of LVDT EPD and air-back polishing carrier significantly enhanced the process performance in Cu CMP.
Archive | 2003
Kenji Sakai; Kazusei Tamai; Atsunori Kawamura; Tsuyoshi Matsuda; Tatsuhiko Hirano; Katsuyoshi Ina
Archive | 2003
Koji Ohno; Chiyo Horikawa; Kenji Sakai; Kazusei Tamai; Katsuyoshi Ina
Archive | 2002
Noriko Miyairi; Yasuo Inada; Tsuyoshi Hasegawa; Yuji Terashima; Kenji Sakai; Tadahiro Kitamura; Takahiro Umeda
Archive | 2003
Koji Fujimi Incorporated Ohno; Chiyo Horikawa; Kenji Sakai; Kazusei Tamai; Katsuyoshi Ina
Archive | 2002
Hiroshi Asano; Katsuyoshi Ina; Tadahiro Kitamura; Kenji Sakai; 克芳 伊奈; 忠浩 北村; 宏 浅野; 謙児 酒井
international symposium on semiconductor manufacturing | 1999
Toshiroh Karaki Doy; Kenji Sakai; H. Jeong; Hitoshi Ohmori; Toshio Kasai
Archive | 2005
Junhui Oh; Atsunori Kawamura; Tsuyoshi Matsuda; Tatsuhiko Hirano; Katsunobu Hori; Kenji Sakai
Archive | 2004
Tsuyoshi Matsuda; Tatsuhiko Hirano; Junhui Oh; Atsunori Kawamura; Kenji Sakai
Archive | 2003
Koji Ohno; Chiyo Horikawa; Kenji Sakai; Kazusei Tamai; Katsuyoshi Ina
Collaboration
Dive into the Kenji Sakai's collaboration.
