Kenneth Bernard Keating

Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices

The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating slots for passive alignment of optical fibers to planar channel waveguides as well as for direct waveguide-to-waveguide coupling. This paper describes KrF excimer laser generation of passive alignment coupling slots and the results achieved using this technique with Polyguid polymeric integrated optic system single and multimode waveguide coupling.