Kenneth D. Cornett

Synthesis of Z-type hexagonal ferrite films by rf magnetron sputtering techniques (abstract)

The synthesis of textured stoichiometric Z-type hexagonal ferrite films, Ba3Me2Fe24O41 (Me2-Z), where Me is a divalent ion, by sputtering techniques is reported. The compound Co2-Z shows a large planar anisotropy with a high permeability at room temperature, and thus, are promising candidates for microwave device applications. The objective here was to develop thin films of these materials for devices on integrable substrates. The films were deposited on unheated Si substrates by rf magnetron sputtering using oxide targets in a mixed argon/oxygen atmosphere. Studies on the crystal structure, composition, and magnetic properties were performed on 1.6 μm thick films. The films were characterized by x-ray diffraction and scanning electron microscopy, and the composition was analyzed by energy dispersive x-ray analysis and Auger electron spectroscopy/secondary-ion-mass-spectroscopy techniques. As-deposited films were amorphous and paramagnetic. The films were subjected, either to a rapid thermal anneal at 900...