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Kevin Griffin

Applied Materials

Publication

Featured researches published by Kevin Griffin.

Archive | 2010

Decontamination of mocvd chamber using nh3 purge after in-situ cleaning

Olga Kryliouk; Jie Su; Kevin Griffin; Sung Won Jun; Sandeep Nijwahan; Xizi Dong; Tze Poon; Lori D. Washington; Jacob Grayson

Archive | 2010

METHOD AND APPARATUS FOR DRY CLEANING A COOLED SHOWERHEAD

Kevin Griffin; Olga Kryliouk; Jie Su

Archive | 2010

Method for in-situ cleaning of deposition systems

Olga Kryliouk; Jie Su; Kevin Griffin; Sandeep Nijhawan

Archive | 2014

Elongated capacitively coupled plasma source for high temperature low pressure environments

John C. Forster; Joseph Yudovsky; Garry K. Kwong; Tai T. Ngo; Kevin Griffin; Kenneth S. Collins; Ren Liu

Archive | 2014

Tilted Plate For Batch Processing And Methods Of Use

Joseph Yudovsky; Kevin Griffin

Archive | 2014

Position And Temperature Monitoring Of ALD Platen Susceptor

Abraham Ravid; Kevin Griffin; Joseph Yudovsky; Kaushal Gangakhedkar; Dmitry A. Dzilno; Alex Minkovich

Archive | 2016

Gas Separation Control in Spatial Atomic Layer Deposition

Ning Li; Steven D. Marcus; Tai T. Ngo; Kevin Griffin

Archive | 2007

Chamber components with increased pyrometry visibility

Joseph Yudovsky; Brendan McDougall; Ravi Jallepally; Yi-Chiau Huang; Maitreyee Mahajani; Kevin Griffin; Andrew C. Sherman

Archive | 2016

Injector For Spatially Separated Atomic Layer Deposition Chamber

Joseph Yudovsky; Kevin Griffin; Aaron Miller; Jeff Tobin; Eran Newman; Tatsuya E. Sato; Patricia M. Liu

Archive | 2015

Top lamp module for carousel deposition chamber

Joseph Yudovsky; Robert T. Trujillo; Kevin Griffin; Garry K. Kwong; Kallol Bera; Li-Qun Xia; Mandyam Sriram

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