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Kikuchi Kazuo

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Publication

Featured researches published by Kikuchi Kazuo.

Archive | 1998

Method and apparatus for forming a thin film of a metal compound

Kikuchi Kazuo; Matsumoto Shigeharu

Archive | 1998

Method for forming a thin film and apparatus for carrying out the method

Kikuchi Kazuo; Yamasaki Yokohama-shi Masafumi; Tang Qi; Matsumoto Shigeharu; Ogura Shigetaro

Archive | 2007

Vorrichtung und Verfahren zur Herstellung einer Dünnschicht

Matsumoto Shigeharu; Kikuchi Kazuo; Song Yizhou; Sakurai Takeshi; Saisho Shinichiro

Archive | 1998

Verfahren zur Herstellung einer dünnen Schicht und Vorrichung zur Durchführung dieses Verfahrens A process for producing a thin layer and Vorrichung for performing this method

Kikuchi Kazuo; Yamasaki Yokohama-shi Masafumi; Tang Yokohama-shi Qi; Matsumoto Shigeharu; Ogura Shigetaro

Archive | 1998

Verfahren zur Herstellung einer dünnen Schicht und Vorrichtung zur Durchführung dieses Verfahrens A process for producing a thin layer, and apparatus for carrying out this method

Kikuchi Kazuo; Yamasaki Yokohama-shi Masafumi; Shigetaro Ogura; Tang Yokohama-shi Qi; Matsumoto Shinjyuku-ku Shigeharu

Archive | 1998

Verfahren und Vorrichtung zum Herstellen von dünnen Schichten einer Metallverbindung Method and device for producing thin layers of a metal compound

Matsumoto Shigeharu; Kikuchi Kazuo

Archive | 1998

Verfahren und Vorrichtung zum Herstellen von dünnen Schichten einer Metallverbindung

Matsumoto Shigeharu; Kikuchi Kazuo

Archive | 1998

Procédé pour obtenir un film mince et appareillage pour la mise en oeuvre de ce procédé

Kikuchi Kazuo; Yamasaki Yokohama-shi Masafumi; Tang Qi; Matsumoto Shigeharu; Ogura Shigetaro

Archive | 1998

Method and device for producing thin layers of a metal compound

Kikuchi Kazuo; Matsumoto Shigeharu

Archive | 1998

A process for producing a thin layer and Vorrichung for performing this method

Kikuchi Kazuo; Yamasaki Yokohama-shi Masafumi; Tang Yokohama-shi Qi; Matsumoto Shigeharu; Ogura Shigetaro

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