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Kiyoshi Araki

Publication

Featured researches published by Kiyoshi Araki.

Archive | 1998

Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

Tsuneaki Ohashi; Kiyoshi Araki; Sadanori Shimura; Yuji Katsuda

Archive | 1999

Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses

Kiyoshi Araki; Yuji Katsuda; Sadanori Shimura; Tsuneaki Ohashi

Archive | 2001

Electrically heated substrate with multiple ceramic parts each having different volume resitivities

Yuji Katsuda; Kiyoshi Araki; Tsuneaki Ohashi

Archive | 1998

ALUMINUM NITRIDE-BASED SINTERED COMPACT, CORROSION- RESISTANT MEMBER, EMBEDDED METAL PRODUCT AND APPARATUS FOR HOLDING SEMICONDUCTOR

Kiyoshi Araki; Yuji Katsuta; Haruaki Ohashi; Sadanori Shimura; 祐司 勝田; 玄章 大橋; 禎徳 志村; 清 新木

Archive | 1998

Semiconductor supporting device

Yuji Katsuda; Kiyoshi Araki; Tsuneaki Ohashi

Archive | 1997

Corrosion resistant member, wafer mounting member, and manufacture of corrosion resistant member

Kiyoshi Araki; Yuji Katsuta; Kuroaki Oohashi; Sadanori Shimura; 祐司 勝田; 玄章 大橋; 禎徳 志村; 清 新木

Archive | 1998

Aluminum nitride sintered body, electronic functional material, and electrostatic chuck

Yuji Katsuda; Kiyoshi Araki; Tsuneaki Ohashi

Archive | 1998

Aluminum nitride based composite body, electronic functional material, electrostatic chuck and method of producing aluminum nitride based composition body

Yuji Katsuda; Kiyoshi Araki; Tsuneaki Ohashi

Archive | 1998

Heating apparatus and manufacture thereof

Kiyoshi Araki; Yuji Katsuta; Kuroaki Oohashi; 祐司 勝田; 玄章 大橋; 清 新木

Archive | 1998

Porous composite ceramic sintered bodies and a production process thereof

Yuji Katsuda; Kiyoshi Araki; Tsuneaki Ohashi

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