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Publication


Featured researches published by Kiyoshi Yokoyama.


Archive | 1990

Silicon nitride sintered body and process for preparation thereof

Makoto Yoshida; Masahiro Sato; Kazunori Koga; Kazumi Osamura; Shoji Kousaka; Tatsumi Maeda; Kiyoshi Yokoyama; Masafumi Matsunaka


Archive | 1986

Silicon nitride sintered body

Kiyoshi Yokoyama


Archive | 1985

Sintered silicon nitride body

Michitaka Mizutani; Kiyoshi Yokoyama


Archive | 2001

Contact heating device

Kiyoshi Yokoyama; Takafumi Turumaru; Hiroyuki Arima; Hideaki Shimozuru


Archive | 1986

Method for production of silicon nitride sintered body

Akito Horiuchi; Kiyoshi Yokoyama; Makoto Yoshida


Archive | 1990

Process for preparing a silicon nitride sintered body

Kiyoshi Yokoyama


Archive | 2007

Bonded body, wafer support member using the same, and wafer treatment method

Kiyoshi Yokoyama


Archive | 2004

Composite material, wafer holding member and method for manufacturing the same

Kiyoshi Yokoyama; Naoko Itonaga


Archive | 2005

Composite material and wafer supporting member and manufacturing method thereof

Kiyoshi Yokoyama; Naoko Itonaga


Archive | 2001

Heated bonding device for mounting semiconductor chip onto multi-layer substrate comprises ceramic heater and pressing tool with thermal isolation element to hold and protect heater

Kiyoshi Yokoyama; Takafumi Turumaru; Hiroyuki Arima; Hideaki Shimozuru

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