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Kobata Itsuki

Ebara Corporation

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Publication

Featured researches published by Kobata Itsuki.

Archive | 2003

ELECTROCHEMICAL MACHINE AND ELECTROCHEMICAL MACHINING METHOD

Nabeya Osamu; Kumekawa Masayuki; Yasuda Hozumi; Kobata Itsuki; Iizumi Takeshi; Takada Nobuyuki; Fukaya Koichi

Archive | 2016

Substrate processing device, substrate processing system, and substrate processing method

Kobata Itsuki; Yagi Keita; Watanabe Katsuhide; Shiokawa Yoichi; Maruyama Toru; Takahashi Nobuyuki

Archive | 2004

Electrolyte processing method and device

Kobata Itsuki; Kumekawa Masayuki; Nabeya Osamu; Serikawa Massahiro Roberto; Saito Takayuki; Tsukuru Suzuki; Akira Kodera; Hozumi Yasuda; Takeshi Iizumi; Mitsuhiko Shirakashi

Archive | 2004

Substrate treating device and substrate treating method

Shirakashi Mitsuhiko; Yasuda Hozumi; Kumekawa Masayuki; Kobata Itsuki

Archive | 2017

Substrate grinding device, polishing method, grinding assembly, grinding program and recording medium

Kobata Itsuki; Watanabe Katsuhide; Yasuda Hozumi; Yagi Yuji; Takahashi Nobuyuki; Takeda Koichi

Archive | 2017

Substrate treatment apparatus, substrate treatment system, and substrate treatment method

Kobata Itsuki; Yagi Keita; Shiokawa Yoichi

Archive | 2017

POLISHING MACHINE AND A POLISHING METHOD FOR A SUBSTRATE

Kobata Itsuki; Watanabe Katsuhide; Yasuda Hozumi; Yagi Yuji; Takahashi Nobuyuki; Takeda Koichi

Archive | 2016

Buffing apparatus, substrate processing apparatus, and buffing method

Yamaguchi Kuniaki; Kobata Itsuki; Mizuno Toshio

Archive | 2016

BUFFING APPARATUS AND SUBSTRATE PROCESSING DEVICE

Yamaguchi Kuniaki; Kobata Itsuki; Mizuno Toshio

Archive | 2016

Grinding apparatus and processing method, polishing processing apparatus and method

Yamaguchi Kuniaki; Mizuno Toshio; Kobata Itsuki; Miyazaki Mitsuru; Toyomura Naoki; Inoue Takuya

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Collaboration

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Yasuda Hozumi

Ebara Corporation

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Kumekawa Masayuki

Ebara Corporation

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Mizuno Toshio

Ebara Corporation

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Shirakashi Mitsuhiko

Ebara Corporation

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Yamaguchi Kuniaki

Ebara Corporation

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Nabeya Osamu

Ebara Corporation

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Saito Takayuki

Ebara Corporation

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Takahashi Nobuyuki

Ebara Corporation

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Watanabe Katsuhide

Ebara Corporation

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Iizumi Takeshi

Ebara Corporation

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