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Kobayashi Kazuo

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Publication

Featured researches published by Kobayashi Kazuo.

Archive | 2001

WAFER THICKNESS MEASURING METHOD

Kobayashi Kazuo; Sekida Saburo; Kayoda Yutaka; Yoshida Motoo

Archive | 2011

CHAMFERING DEVICE OF SILICON INGOT

Yoshida Yutaka; Kobayashi Kazuo; Saito Koji; Kida Hiroaki

Archive | 2010

CHAMFERING DEVICE OF PRISMATIC SILICON INGOT, AND CHAMFERING METHOD OF PRISMATIC SILICON INGOT USING THE SAME

Saito Koji; Kobayashi Kazuo; Kubo Tomio; Kida Hiroaki; Tsuji Katsuhiro

Archive | 2010

Chamfering apparatus of silicon ingot and method for chamfering prismatic silicon ingot by using the same

Kobayashi Kazuo; Saito Koji; Kubo Tomio

Archive | 2011

COMPOUND CHAMFERING DEVICE OF INGOT BLOCK

Yoshida Yutaka; Kobayashi Kazuo; Takeda Shuji; Saito Koji; Ide Satoru; Kubo Tomio

Archive | 2009

SURFACE GRINDING MACHINE FOR SUBSTRATE

Kashiwa Moriyuki; Fujita Etsuo; Kobayashi Kazuo; Kubo Tomio

Archive | 2007

FLATTENING DEVICE AND METHOD OF SEMICONDUCTOR SUBSTRATE

Kobayashi Kazuo; Sekida Saburo; Tsuji Katsuhiro; Kubo Tomio

Archive | 2010

CHAMFERING DEVICE FOR LAMINATED WAFER, AND METHOD FOR CHAMFERING BEVEL AND EDGE OF LAMINATED WAFER USING THE SAME

Saito Koji; Kobayashi Kazuo; Yamamoto Eiichi

Archive | 2011

CYLINDRICAL GRINDING DEVICE AND CYLINDRICAL GRINDING METHOD FOR SILICON INGOT

Yoshida Yutaka; Kobayashi Kazuo; Saito Koji; Kubo Tomio

Archive | 2011

PAD TRANSFER MECHANISM FOR SEMICONDUCTOR SUBSTRATE

Kobayashi Kazuo; Yamamoto Eiichi; Kubo Tomio

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