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Koji Egashira

Tokyo Electron

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Publication

Featured researches published by Koji Egashira.

Archive | 2001

Processing apparatus with sealing mechanism

Yuji Kamikawa; Koji Egashira

Archive | 2006

Batch forming apparatus, substrate processing system, batch forming method, and storage medium

Yuji Kamikawa; Koji Egashira

Archive | 2003

Rotary processing apparatus with holding bars having drain grooves

Koji Egashira

Archive | 2002

Rotary substrate processing apparatus and method

Koji Egashira; Sadayuki Fujishima; Yuji Kamikawa

Archive | 2005

Substrate treatment unit, batch organization unit, batch organization method and batch organization program

Koji Egashira; Yuji Kamikawa; 裕二 上川; 浩司 江頭

Archive | 2003

Rotary shaft sealing mechanism and liquid processing apparatus

Koji Egashira; Yuji Kamikawa; Masaki Taira

Archive | 2001

Treatment system with sealing mechanism

Koji Egashira; Yuji Kamikawa; 裕二 上川; 浩司 江頭

Archive | 2010

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method

Yuji Kamikawa; Hiroaki Inadomi; Hideyuki Yamamoto; Hiroshi Komiya; Koji Egashira

Archive | 2008

Nano fiber-producing apparatus

Koji Egashira; Ryuji Inai; 浩司 江頭; 龍二 稲井

Archive | 2005

Substrate processing apparatus and substrate transferring method

Yuji Kamikawa; Koji Egashira

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Yuji Kamikawa

Tokyo Electron

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Hideyuki Yamamoto

Tokyo Electron

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Hiroaki Inadomi

Tokyo Electron

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Hiroshi Komiya

Tokyo Electron

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