Kouichi Kajiwara

Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment

This paper verifies the performance of the active microvibration control system using the piezoelectric actuators with a table of length 3 m, width 1.8 m and weight 4,000 kg, which was applied to the large-scale semiconductor manufacturing equipment whose microlithographic accuracy was actually degraded due to the constant vibration. The mounted equipment was the integral-design semiconductor manufacturing equipment weighing 2,600 kg. The controller was designed by the method dependent on the coprime factor plant model in the preceding study for preventing the elastic vibration of the equipment and table from causing the spillover phenomena of the control system. For frequency forming algorithm, the model matching method and H(infinity ) method were employed. As a result of this systems application, the microlithographic accuracy of the manufacturing equipment could be recovered.

Large Scale Shaking Table Tests for High-Rise Buildings: New Projects of E-Defense

No actual data based on observations are available for high-rise buildings subjected to long-period ground motions. In order to acquire realistic data on the damage, a series of large-scale shaking table tests were conducted in E-Defense, a large shaking table facility. The paper presents ongoing high-rise building projects at E-Defense. First, the earthquake threats of Japan and the backgrounds of E-Defense are introduced. Second, a series of shaking table tests for the seismic performance of building structures are presented. In these tests a number of cyclic deformations are applied to a steel moment frame. Third, a shaking table test focusing on the safety of rooms is presented. The test reproduced large responses of floors, characterized by large velocities and displacements.