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Dive into the research topics where Kouichi Ohira is active.

Publication


Featured researches published by Kouichi Ohira.


Archive | 2004

Apparatus for manufacturing semiconductor device

Kazuo Maeda; Kouichi Ohira; Mitsuo Hirose


Archive | 1995

Apparatus for forming film

Kazuo Semiconductor C. O. Maeda; Kouichi Ohira; Yuhko Nishimoto


Archive | 1995

Substrate holder and reaction apparatus

Kazuo Maeda; Kouichi Ohira; Yuhko Nishimoto


Archive | 2001

Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent

Yoshimi Shioya; Kouichi Ohira; Kazuo Maeda; Tomomi Suzuki; Hiroshi Ikakura; Youichi Yamamoto; Yuichiro Kotake; Shoji Ohgawara; Makoto Kurotobi


Archive | 1992

Semiconductor fabrication equipment

Kazuo Maeda; Kouichi Ohira; Mitsuo Hirose


Archive | 2000

Film forming method and semiconductor device

Yoshimi Shioya; Yuichiro Kotake; Youichi Yamamoto; Tomomi Suzuki; Hiroshi Ikakura; Shoji Ohgawara; Kouichi Ohira; Kazuo Maeda


Archive | 1999

Plasma doping system and plasma doping method

Kouichi Ohira; Bunya Matsui; Kazuo Maeda


Archive | 2001

Semiconductor device and mehtod of manufacturing the same

Yoshimi Shioya; Kouichi Ohira; Kazuo Maeda; Tomomi Suzuki; Youichi Yamamoto; Yuichiro Kotake; Hiroshi Ikakura; Shoji Ohgawara


Archive | 2001

Film forming method, semiconductor device manufacturing method, and semiconductor device

Hiroshi Ikakura; Tomomi Suzuki; Kazuo Maeda; Yoshimi Shioya; Kouichi Ohira


Archive | 2001

Film forming method, semiconductor device and manufacturing method of the same

Youichi Yamamoto; Hiroshi Ikakura; Tomomi Suzuki; Yuichiro Kotake; Yoshimi Shioya; Kouichi Ohira; Shoji Ohgawara; Kazuo Maeda

Collaboration


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