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Featured researches published by Kuehn Eberhard.


Archive | 1974

Method of forming a photo-cross-linked insulator film

Kleeberg Wolfgang; Kuehn Eberhard; Rubner Roland


Archive | 1976

VERFAHREN ZUR HERSTELLUNG VON SCHICHTSTRUKTUREN

Rubner Roland Dr; Kleeberg Wolfgang Dr; Kuehn Eberhard


Archive | 2000

Resists auf der Basis von oligomeren und/oder polymeren Polybenzoxazol-Vorstufen

Hammerschmidt Albert; Kuehn Eberhard; Leuschner Rainer; Schmidt Erwin


Archive | 1990

High resolution positive working photoresists - comprising polymer contg. carboxylic acid anhydride or phenolic hydroxyl gps. and substd. 1,4-di:hydro:pyridine cpd. as photoactive agent

Hammerschmidt Albert Dipl Chem; Kuehn Eberhard; Schmidt Erwin; Ahne Hellmut Dr; Sebald Michael Dr


Archive | 1981

POLYOXAZOL-VORSTUFEN SOWIE DEREN HERSTELLUNG.

Ahne Hellmut Dr; Rubner Roland Dr; Kuehn Eberhard


Archive | 1980

N-Azidosulfonylaryl-maleinimide sowie deren Verwendung

Rubner Roland Dr; Kuehn Eberhard; Ahne Hellmut Dr


Archive | 1976

Polymeric relief structures prepn. - using radiation - sensitive prepolymers contg. ester gps. derived from hydroxylated maleinimides

Rubner Roland Dr; Kleeberg Wolfgang Dr; Kuehn Eberhard


Archive | 1981

STRAHLUNGSREAKTIVE VORSTUFEN HOCHWAERMEBESTAENDIGER POLYMERER

Ahne Hellmut Dr; Kuehn Eberhard; Rubner Roland Dr


Archive | 2004

Herstellung von Polybenzoxazol- und Polybenzothiazol-Vorstufen

Sezi Recai Dr; Kuehn Eberhard; Ahne Hellmut Dr; Kocman Dipl-Chem


Archive | 1996

Hochwärmebeständige Negativresists und Verfahren zur Herstellung hochwärmebeständiger Reliefstrukturen

Hammerschmidt Albert Dr; Schmidt Erwin; Kuehn Eberhard

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