Kunal Lulla

Nonlinear modal coupling in a high-stress doubly-clamped nanomechanical resonator

We present results from a study of the nonlinear inter-modal coupling between different flexural vibrational modes of a single high-stress, doubly-clamped silicon nitride nanomechanical beam. Using the magnetomotive technique and working at 100 mK we explored the nonlinear behaviour and modal couplings of the first, third and fifth modes of a 25.5 μm long beam. We find very good agreement between our results and a simple analytical model which assumes that the different modes of the resonator are coupled to each other by displacement induced tension in the beam. The small size of our resonator leads to relatively strong nonlinear couplings, for example we find a shift of about 7 Hz in the third mode for a 1 nm displacement in the first mode and frequency shifts ~ 20 times larger than the linewidth (130 Hz) are readily observed.

Dissipation due to tunneling two-level systems in gold nanomechanical resonators

We present measurements of the dissipation and frequency shift in gold nanomechanical resonators at temperatures down to 10 mK. The resonators were fabricated as doubly clamped beams above a GaAs substrate and actuated magnetomotively. Measurements on beams with frequencies 7.95 and 3.87 MHz revealed that from 30 to 500 mK the dissipation increases with temperature as T 0.5 , with saturation occurring at higher temperatures. The relative frequency shift of the resonators increases logarithmically with temperature up to at least 400 mK. Similarities with the behavior of bulk amorphous solids suggest that the dissipation in our resonators is dominated by two-level systems.

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3ω-Völklein method

We present a specific heat measurement technique adapted to thin or very thin suspended membranes from low temperature (8 K) to 300 K. The presented device allows the measurement of the heat capacity of a 70 ng silicon nitride membrane (50 or 100 nm thick), corresponding to a heat capacity of 1.4 × 10(-10) J/K at 8 K and 5.1 × 10(-8) J/K at 300 K. Measurements are performed using the 3ω method coupled to the Völklein geometry. This configuration allows the measurement of both specific heat and thermal conductivity within the same experiment. A transducer (heater/thermometer) is used to create an oscillation of the heat flux on the membrane; the voltage oscillation appearing at the third harmonic which contains the thermal information is measured using a Wheatstone bridge set-up. The heat capacity measurement is performed by measuring the variation of the 3ω voltage over a wide frequency range and by fitting the experimental data using a thermal model adapted to the heat transfer across the membrane. The experimental data are compared to a regular Debye model; the specific heat exhibits features commonly seen for glasses at low temperature.

Slippage and Boundary Layer Probed in an Almost Ideal Gas by a Nanomechanical Oscillator

We measure the interaction between ⁴He gas at 4.2 K and a high-quality nanoelectromechanical string device for its first three symmetric modes (resonating at 2.2, 6.7, and 11 MHz with quality factor Q>0.1×10⁶) over almost 6 orders of magnitude in pressure. This fluid can be viewed as the best experimental implementation of an almost ideal monoatomic and inert gas of which properties are tabulated. The experiment ranges from high pressure where the flow is of laminar Stokes-type presenting slippage down to very low pressures where the flow is molecular. In the molecular regime, when the mean-free path is of the order of the distance between the suspended nanomechanical probe and the bottom of the trench, we resolve for the first time the signature of the boundary (Knudsen) layer onto the measured dissipation. Our results are discussed in the framework of the most recent theories investigating boundary effects in fluids (both analytic approaches and direct simulation Monte Carlo methods).

In-situ comprehensive calibration of a tri-port nano-electro-mechanical device

We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very nonlinear capacitive actuation, while the two others implement the magnetomotive scheme with a linear input force port and a (quasi-linear) output velocity port. We present an experimental method enabling a full characterization of the nanomechanical device harmonic response: the nonlinear capacitance function C(x) is derived, and the normal parameters k and m (spring constant and mass) of the mode under study are measured through a careful definition of the motion (in meters) and of the applied forces (in Newtons). These results are obtained with a series of purely electric measurements performed without disconnecting/reconnecting the device, and rely only on known dc properties of the circuit, making use of a thermometric property of the oscillator itself: we use the Young modulus of the coating metal as a thermometer, and the resistivity for Joule heating. The setup requires only three connecting lines without any particular matching, enabling the preservation of a high impedance NEMS environment even at MHz frequencies. The experimental data are fit to a detailed electrical and thermal model of the NEMS device, demonstrating a complete understanding of its dynamics. These methods are quite general and can be adapted (as a whole, or in parts) to a large variety of electromechanical devices.

Evidence for the role of normal-state electrons in nanoelectromechanical damping mechanisms at very low temperatures.

We report on experiments performed at low temperatures on aluminum covered silicon nanoelectromechanical resonators. The substantial difference observed between the mechanical dissipation in the normal and superconducting states measured within the same device unambiguously demonstrates the importance of normal-state electrons in the damping mechanism. The dissipative component becomes vanishingly small at very low temperatures in the superconducting state, leading to exceptional values for the quality factor of such small silicon structures. A critical discussion is given within the framework of the standard tunneling model.

Audio mixing in a tri-port nano-electro-mechanical device

We report on experiments performed on a cantilever-based tri-port nano-electro-mechanical (NEMS) device. Two ports are used for actuation and detection through the magnetomotive scheme, while the third port is a capacitively coupled gate electrode. By applying a low frequency voltage signal on the gate, we demonstrate mixing in the mechanical response of the device, even for low magnetomotive drives without resorting to conduction measurements through the NEMS. The technique can thus be used, in particular, in the linear regime as an alternative to nonlinear mixing for normal conducting devices. An analytic theory is presented reproducing the data without free parameters.

Universality of thermal transport in amorphous nanowires at low temperatures

Thermal transport properties of amorphous materials at low temperatures are governed by the interaction between phonons and localized excitations referred to as tunneling two-level systems (TLSs). The temperature variation of the thermal conductivity of these amorphous materials is considered as universal and is characterized by a quadratic power law. This is well described by the phenomenological TLS model even though its microscopic explanation is still elusive. Here, by scaling down to the nanometer-scale amorphous systems much below the bulk phonon-TLS mean free path, we probe the robustness of that model in restricted geometry systems. Using very sensitive thermal conductance measurements, we demonstrate that the temperature dependence of the thermal conductance of silicon nitride nanostructures remains mostly quadratic independently of the nanowire section. It does not follow the cubic power law in temperature as expected in a Casimir-Ziman regime of boundary-limited thermal transport. This shows a thermal transport counterintuitively dominated by phonon-TLS interactions and not by phonon boundary scattering in the nanowires. This could be ascribed to an unexpected high density of TLSs on the surfaces which still dominates the phonon diffusion processes at low temperatures and explains why the universal quadratic temperature dependence of thermal conductance still holds for amorphous nanowires.

Thermal conductivity measurement of suspended Si-N membranes from 10 K to 275 K using the 3ω-Völklein method

The thermal properties of suspended thin films prepared by the micro-machining process have been measured using the 3ω dynamic method coupled to a Volklein geometry. A transducer (heater/thermometer) centered on the membrane is driven by an ac current causing periodic thermal oscillations. The measurement of the temperature oscillation on the membrane is made at the third harmonic using a Wheatstone bridge set up. Here by coupling the 3ω method to a Volklein geometry (suspended membrane) we obtained a highly sensitive technique to measure the thermal conductance with a resolution of (ΔK/K = 10−3) and a sensitivity of the order of nanoWatt/K, thanks to a very sensitive niobium nitride thermometry. This method is applied to measure the in-plane thermal conductivity of 100 nm silicon nitride membrane, in the temperature range of 10–275 K.

Heat conduction measurements in ballistic 1D phonon waveguides indicate breakdown of the thermal conductance quantization

Emerging quantum technologies require mastering thermal management, especially at the nanoscale. It is now accepted that thermal metamaterial-based phonon manipulation is possible, especially at sub-kelvin temperatures. In these extreme limits of low temperatures and dimensions, heat conduction enters a quantum regime where phonon exchange obeys the Landauer formalism. Phonon transport is then governed by the transmission coefficients between the ballistic conductor and the thermal reservoirs. Here we report on ultra-sensitive thermal experiments made on ballistic 1D phonon conductors using a micro-platform suspended sensor. Our thermal conductance measurements attain a power sensitivity of 15 attoWatts