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Kurt A. Olson

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Publication

Featured researches published by Kurt A. Olson.

Archive | 1997

Plasma etch reactor and method

Stephen P. Deornellas; Leslie G. Jerde; Alferd Cofer; Robert C. Vail; Kurt A. Olson

Archive | 1998

Plasma etch reactor having a plurality of magnets

Stephen P. Deornellas; Leslie G. Jerde; Alferd Cofer; Robert C. Vail; Kurt A. Olson

Archive | 1997

Method for minimizing the critical dimension growth of a feature on a semiconductor wafer

Stephen P. Deornellas; Alferd Cofer; Leslie G. Jerde; Kurt A. Olson; Paritosh Rajora

Archive | 2001

Reactor with heated and textured electrodes and surfaces

Stephen P. Deornellas; Leslie G. Jerde; Kurt A. Olson

Archive | 2000

Improved reactor with heated and textured electrodes and surfaces

Stephen P. Deornellas; Leslie G. Jerde; Kurt A. Olson

Archive | 2000

Verbesserter reaktor mit erwärmten und texturierten oberflächen

Stephen P. Deornellas; Leslie G. Jerde; Kurt A. Olson

Archive | 1998

Methode zur minimierung des kritischen grossenwachstums von strukturen auf halbleiterschreiben

Alferd Cofer; Stephen P. Deornellas; Leslie G. Jerde; Kurt A. Olson; Paritosh Rajora

Archive | 1998

Plasma etch reactor

Stephen P. Deornellas; Leslie G. Jerde; Alferd Cofer; Robert C. Vail; Kurt A. Olson

Archive | 1997

Plasma etch reactor and method of operating it

Stephen P. Deornellas; Leslie G. Jerde; Alferd Cofer; Robert C. Vail; Kurt A. Olson

Archive | 1997

Plasmaätzreaktor und verfahren zu seinem betrieb

Stephen P. Deornellas; Leslie G. Jerde; Alferd Cofer; Robert C. Vail; Kurt A. Olson

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