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Kwan Yim Bun Patrick

ASML Holding

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Publication

Featured researches published by Kwan Yim Bun Patrick.

Archive | 2000

Lithographic projection apparatus and method for manufacturing device using it

Kwan Yim Bun Patrick; Van De Pasch Engelbertus A F; Ariens Andreas Bernardus Gerar; Munnig Schmid Robert-Han; Hoogkamp Jan F; Buis Edwin Johan

Archive | 2001

CLEANING GAS SYSTEM IN LITHOGRAPHY PROJECTION SYSTEM

Schrijver Raymond Laurentius J; Van Empel Tjarko Adriaan Rudol; Baggen Marcel Koenraad M; Luttikhuis Bernardus Antonius; Kwan Yim Bun Patrick; Loopstra Erik Roelof

Archive | 2001

LITHOGRAPHY PROJECTION SYSTEM WITH TEMPERATURE- CONTROLLED HEAT SHIELD

Loopstra Erik R; Kwan Yim Bun Patrick; Muitjens Marcel J E H; De Vrieze-Voorn Sonja Theodora

Archive | 2001

LITHOGRAPHIC PROJECTION APPARATUS HAVING TEMPERATURE-CONTROLLED HEAT SHIELD SHIELD

De Vrieze-Voorn Sonja Theodora; Kwan Yim Bun Patrick; Loopstra Erik Roelof; Muitjens Marcel J E H

Archive | 2001

POSITION DETECTION SYSTEM FOR USE IN LITHOGRAPHY EQUIPMENT

Castenmiller Thomas Josephus M; Ariens Andreas Bernardus Gerar; Hoeks Martinus Hendricus Hendr; Vogelsang Patrick D; Loopstra Erik R; Kwan Yim Bun Patrick

Archive | 2007

Lithographischer Apparat mit einem ausbalancierten Positionierungssystem

Kwan Yim Bun Patrick

Archive | 2013

Structure for use in a projection exposure system of the type used for manufacturing semiconductors

Kwan Yim Bun Patrick; Geuppert Bernhard; Kemper Nico

Archive | 2012

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURINGMETHOD

Van Der Wijst Marc Wilhelmus Maria; Butler Hans; Loopstra Erik Roelof; Geuppert Bernhard; Oude Nijhuis Marco Hendrikus Hermanus; Guglielmi Rabe Rodolfo; Kwan Yim Bun Patrick; Laro Dick Antonius Hendrikus

Archive | 2007

Lithographischer Apparat mit einem System zur Positionsdetektion

Castenmiller Thomas Josephus M; Ariens Andreas Bernardus Gerar; Hoeks Martinus Hendricus Hendr; Vogelsang Patrick David; Loopstra Erik Roelof; Kwan Yim Bun Patrick

Archive | 2001

LITHOGRAPHIC PROJECTION APPARATUS WITH PURGE GAS SYSTEM AND METHOD THEREOF

Baggen Marcel Koenraad; Kwan Yim Bun Patrick; Loopstra Erik Roelof; Luttikhuis Bernardus Antonius; Schrijver Raymond Laurentius J; Van Empel Tjarko Adriaan Rudol

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