L. G. Villanueva
California Institute of Technology
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by L. G. Villanueva.
Physical Review Letters | 2014
M. H. Matheny; Matt Grau; L. G. Villanueva; R. B. Karabalin; M. C. Cross; Michael L. Roukes
We investigate the synchronization of oscillators based on anharmonic nanoelectromechanical resonators. Our experimental implementation allows unprecedented observation and control of parameters governing the dynamics of synchronization. We find close quantitative agreement between experimental data and theory describing reactively coupled Duffing resonators with fully saturated feedback gain. In the synchronized state we demonstrate a significant reduction in the phase noise of the oscillators, which is key for sensor and clock applications. Our work establishes that oscillator networks constructed from nanomechanical resonators form an ideal laboratory to study synchronization--given their high-quality factors, small footprint, and ease of cointegration with modern electronic signal processing technologies.
Physical Review Letters | 2013
L. G. Villanueva; Eyal Kenig; R. B. Karabalin; M. H. Matheny; Ron Lifshitz; M. C. Cross; Michael L. Roukes
In its most basic form an oscillator consists of a resonator driven on resonance, through feedback, to create a periodic signal sustained by a static energy source. The generation of a stable frequency, the basic function of oscillators, is typically achieved by increasing the amplitude of motion of the resonator while remaining within its linear, harmonic regime. Contrary to this conventional paradigm, in this Letter we show that by operating the oscillator at special points in the resonators anharmonic regime we can overcome fundamental limitations of oscillator performance due to thermodynamic noise as well as practical limitations due to noise from the sustaining circuit. We develop a comprehensive model that accounts for the major contributions to the phase noise of the nonlinear oscillator. Using a nanoelectromechanical system based oscillator, we experimentally verify the existence of a special region in the operational parameter space that enables suppressing the most significant contributions to the oscillators phase noise, as predicted by our model.
Physical Review B | 2013
L. G. Villanueva; R. B. Karabalin; M. H. Matheny; Derrick Chi; John E. Sader; Michael L. Roukes
Euler-Bernoulli beam theory is widely used to successfully predict the linear dynamics of micro- and nanocantilever beams. However, its capacity to characterize the nonlinear dynamics of these devices has not yet been rigorously assessed, despite its use in nanoelectromechanical systems development. In this article, we report the first highly controlled measurements of the nonlinear response of nanomechanical cantilevers using an ultralinear detection system. This is performed for an extensive range of devices to probe the validity of Euler-Bernoulli theory in the nonlinear regime. We find that its predictions deviate strongly from our measurements for the nonlinearity of the fundamental flexural mode, which show a systematic dependence on aspect ratio (length/width) together with random scatter. This contrasts with the second mode, which is always found to be in good agreement with theory. These findings underscore the delicate balance between inertial and geometric nonlinear effects in the fundamental mode, and strongly motivate further work to develop theories beyond the Euler-Bernoulli approximation.
Physical Review Letters | 2012
R. B. Karabalin; L. G. Villanueva; M. H. Matheny; John E. Sader; Michael L. Roukes
The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced change in cantilever stiffness with commensurate theoretical quantification. Simultaneous measurements are also performed on equivalent clamped-clamped beams. All experimental results are quantitatively and accurately predicted using elasticity theory. We also present conclusive experimental evidence for invalidity of the long-standing and unphysical axial force model, which has been widely applied to interpret measurements using cantilever beams. Our findings will be of value in the development of micro- and nanoscale resonant mechanical sensors.
Nano Letters | 2013
M. H. Matheny; L. G. Villanueva; R. B. Karabalin; John E. Sader; Michael L. Roukes
Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced nanomechanical devices; it has important implications for applications ranging from quantitative sensing to fundamental research. However, achieving accurate experimental characterization of nonlinearities in nanomechanical systems (NEMS) is problematic. Currently employed detection and actuation schemes themselves tend to be highly nonlinear, and this unrelated nonlinear response has been inadvertently convolved into many previous measurements. In this Letter we describe an experimental protocol and a highly linear transduction scheme, specifically designed for NEMS, that enables accurate, in situ characterization of device nonlinearities. By comparing predictions from Euler-Bernoulli theory for the intra- and intermodal nonlinearities of a doubly clamped beam, we assess the validity of our approach and find excellent agreement.
Journal of Micromechanics and Microengineering | 2011
P Ivaldi; J Abergel; M. H. Matheny; L. G. Villanueva; R. B. Karabalin; Michael L. Roukes; Philippe Andreucci; Sébastien Hentz; E. Defay
Due to low power operation, intrinsic integrability and compatibility with CMOS processing, aluminum nitride (AlN) piezoelectric (PZE) microcantilevers are a very attractive paradigm for resonant gas sensing. In this paper, we theoretically investigate their ultimate limit of detection and enunciate design rules for performance optimization. The reduction of the AlN layer thickness is found to be critical. We further report the successful development and implementation in cantilever structures with a 50 nm thick active PZE AlN layer. Material characterizations demonstrate that the PZE e_(31) coefficient can remain as high as 0.8 C m^(−2). Electrically transduced frequency responses of the fabricated devices are in good agreement with analytical predictions. Finally, we demonstrate the excellent frequency stability with a 10^(−8) minimum Allan deviation. This exceptionally low noise operation allows us to expect a limit of detection as low as 53 zg µm^(−2) and demonstrate the strong potential of AlN PZE microcantilevers for high resolution gas detection.
Physical Review E | 2012
Eyal Kenig; M. C. Cross; L. G. Villanueva; R. B. Karabalin; M. H. Matheny; Ron Lifshitz; Michael L. Roukes
We demonstrate an analytical method for calculating the phase sensitivity of a class of oscillators whose phase does not affect the time evolution of the other dynamic variables. We show that such oscillators possess the possibility for complete phase noise elimination. We apply the method to a feedback oscillator which employs a high Q weakly nonlinear resonator and provide explicit parameter values for which the feedback phase noise is completely eliminated and others for which there is no amplitude-phase noise conversion. We then establish an operational mode of the oscillator which optimizes its performance by diminishing the feedback noise in both quadratures, thermal noise, and quality factor fluctuations. We also study the spectrum of the oscillator and provide specific results for the case of 1/f noise sources.
Physical Review Letters | 2012
Eyal Kenig; M. C. Cross; Ron Lifshitz; R. B. Karabalin; L. G. Villanueva; M. H. Matheny; Michael L. Roukes
We introduce a new method for reducing phase noise in oscillators, thereby improving their frequency precision. The noise reduction is realized by a passive device consisting of a pair of coupled nonlinear resonating elements that are driven parametrically by the output of a conventional oscillator at a frequency close to the sum of the linear mode frequencies. Above the threshold for parametric instability, the coupled resonators exhibit self-oscillations which arise as a response to the parametric driving, rather than by application of active feedback. We find operating points of the device for which this periodic signal is immune to frequency noise in the driving oscillator, providing a way to clean its phase noise. We present results for the effect of thermal noise to advance a broader understanding of the overall noise sensitivity and the fundamental operating limits.
Review of Scientific Instruments | 2012
Giordano Tosolini; L. G. Villanueva; Francesc Pérez-Murano; J. Bausells
Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still not fully developed. Here, we present an on-wafer, highly precise, and rapid characterization method to measure the mechanical, electrical, and electromechanical properties of piezoresistive cantilevers. The setup is based on a combination of probe-card and atomic force microscopy technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this setup we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity Re(F) = 158μV/nN, a noise of 5.8 μV (1 Hz-1 kHz) and a minimum detectable force of 37 pN with a relative standard deviation of σ(r) ≈ 8%. This small value of σ(r), together with a high fabrication yield >95%, validates our fabrication technology. These devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.
IEEE Transactions on Nanotechnology | 2011
L. G. Villanueva; Cristina Martin-Olmos; Oscar Vazquez-Mena; Josep M. Montserrat; Philippe Langlet; J. Bausells; Juergen Brugger
A method is presented that allows the definition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested for both phosphorus and arsenic ions. Electrical characterization confirms the activation of the impurities in the implanted zones whereas topological characterization shows minimum dimensions of 110 nm with an increase in dimensions compared to stencil apertures that is dominated by backscattering of the ions during implantation.