Laurent Duraffourg

NEMS gas sensors for breakthrough GC multigas analysis systems

This paper presents NEMS gas sensors implemented in a breakthrough multigas analysis system. The NEMS mass sensors are collectively fabricated, functionalized and packaged at wafer level. NEMS array resonators exhibit good frequency stability (Allan deviation <;5.10-7 in air). After implementation in the multigas analysis system, the capability to analyze complex gas mixtures for Industrial and Indoor Air Quality monitoring has been demonstrated, with typical Limit of Detection in ppm down to ppb level.

Thin SQI NEMS accelerometers compatible with In-IC integration

The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with In-IC integration. The goal of this work is to demonstrate the feasibility in terms of concept and technological manufacturing. Modeling of Casimir force, development of hybrid e-beam/DUV lithography and FH-vapor release, specific AFM characterizations have allowed to design, fabricate and characterize first devices.