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Lee Luo

Applied Materials

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Publication

Featured researches published by Lee Luo.

Archive | 2001

Cycling deposition of low temperature films in a cold wall single wafer process chamber

Lee Luo; Sang Hoon Ahn; Aihua Chen; R. Iyer; Shulin Wang; Randhir P. Singh Thakur

Archive | 2002

Cyclical deposition of tungsten nitride for metal oxide gate electrode

Shulin Wang; Ulrich Kroemer; Lee Luo; Aihua Chen; Ming Li

Archive | 2001

Method of annealing an oxide film

Guangcai Xing; Lee Luo; Aihua Chen; Errol Antonio C. Sanchez; Christopher G. Quentin; Kuan-Ting Lin; Shih-Che Lin

Archive | 2001

Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD

Janardhanan Anand Subramony; Yoshitaka Yokota; R. Iyer; Lee Luo; Aihua Chen

Archive | 2002

Doped silicon deposition process in resistively heated single wafer chamber

Shulin Wang; Lee Luo; Steven A. Chen; Errol Antonio C. Sanchez; Xianzhi Tao; Zoran Dragojlovic; Li Fu

Archive | 2002

Method of forming a silicon nitride layer on a substrate

Steven A. Chen; Xianzhi Tao; Shulin Wang; Lee Luo; Kegang Huang; Sang H. Ahn

Archive | 2002

Emissivity-change-free pumping plate kit in a single wafer chamber

Xiaoliang Jin; Shulin Wang; Lee Luo; Henry Ho; Steven A. Chen

Archive | 2008

Tungsten nitride atomic layer deposition processes

Shulin Wang; Ulrich Kroemer; Lee Luo; Aihua Chen; Ming Li

Archive | 2002

Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber

Lee Luo; Suryanarayanan R. Iyer; Janardhanan Anand Subramony; Errol Antonio C. Sanchez; Xiaoliang Jin; Aihua Steven Chen; Changlian Yan; Nobuo Tokai; Yuji Maeda; Randhir Thakur

Archive | 2002

Method for cyclic cvd

Lee Luo; Sang Hoon Ahn; Aihua Chen; R. Iyer; Shulin Wang; Randhir P. Singh Thakur

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Shulin Wang

Applied Materials

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Steven A. Chen

Applied Materials

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Xianzhi Tao

Applied Materials

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Aihua Chen

Applied Materials

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R. Iyer

Applied Materials

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Errol Antonio C. Sanchez

Applied Materials

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Li Fu

Applied Materials

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Kegang Huang

Applied Materials

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Xiaoliang Jin

Applied Materials

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Christopher G. Quentin

Applied Materials

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