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Leon H. Kaplan

IBM

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Publication

Featured researches published by Leon H. Kaplan.

Archive | 1973

Process for forming a resist mask

Richard S Horst; Leon H. Kaplan; David Paul Merritt

Archive | 1976

Photoresist O-quinone diazide containing composition and resist mask formation process

Leon H. Kaplan; Steven M. Zimmerman

Archive | 1980

Plasma develoment of resists

Leon H. Kaplan; Steven M. Zimmerman

Archive | 1975

Modified processing of positive photoresists

Leon H. Kaplan; Steven M. Zimmerman

Archive | 1975

Photoresist process and photosensitive O-quinone diazide article with aliphatic carboxylic acid as adhesion promotor

Leon H. Kaplan; John Baldwin Lounsbury; Steven M. Zimmerman

Archive | 1993

Fabrication of laser ablation masks by wet etching

Leon H. Kaplan

Archive | 1995

Laser ablation mask and method of fabrication

Leon H. Kaplan; Doris P. Pulaski

Archive | 1982

Resolution in optical lithography

Leon H. Kaplan; Richard D. Kaplan; Steven M. Zimmerman

Archive | 1981

Process for producing a patterned resist image

Leon H. Kaplan; Steven M. Zimmerman

Archive | 1983

Dry-developed, negative working electron resist system

Leon H. Kaplan; Richard D. Kaplan

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Steven M. Zimmerman

IBM

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Richard D. Kaplan

IBM

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John Baldwin Lounsbury

IBM

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David Paul Merritt

IBM

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Doris P. Pulaski

IBM

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Nungavaram Sundaram Viswanathan

IBM

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Richard S Horst

IBM

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