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Levinus Pieter Bakker

ASML Holding

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Publication

Featured researches published by Levinus Pieter Bakker.

Archive | 2006

Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method

Maarten Marinus Johannes Wilhelmus Van Herpen; Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Derk Jan Wilfred Klunder

Archive | 2003

Lithographic projection apparatus and reflector assembly for use therein

Levinus Pieter Bakker; Jeroen Jonkers; Frank Jeroen Pieter Schuurmans; Hugo Matthieu Visser

Archive | 2003

Lithographic projection apparatus and particle barrier for use therein

Levinus Pieter Bakker; Frank Jeroen Pieter Schuurmans; Vadim Yevgenyevich Banine

Archive | 2005

Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Johannes Hubertus Josephina Moors; Carolus Ida Maria Antonius Spee; Johannes Christiaan Leonardus Franken; Arnoud Cornelis Wassink; Paul Peter Anna Antonius Brom

Archive | 2003

Contamination barrier with expandable lamellas

Levinus Pieter Bakker; Marcel Mathijs Theodore Marie Dierichs; Johannes Maria Freriks; Frank Jeroen Pieter Schuurmans; Jakob Vijfvinkel; Wilhelmus Josephus Box

Archive | 2004

Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Cornelis Petrus Andreas Maria Luijkx; Frank Jeroen Pieter Schuurmans

Archive | 2009

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

Maarten Marinus Johannes Wilhelmus Van Herpen; Levinus Pieter Bakker; Derk Jan Wilfred Klunder

Archive | 2004

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

Levinus Pieter Bakker; Frank Jeroen Pieter Schuurmans; Vadim Yevgenyevich Banine

Archive | 2004

Lithographic apparatus, illumination system and debris trapping system

Levinus Pieter Bakker; Derk Jan Wilfred Klunder; Maarten Marinus Johannes Wilhelmus Van Herpen

Archive | 2004

Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby

Levinus Pieter Bakker; Vadim Yevgenyevich Banine; Vladimir Vitalevitch Ivanov; Konstantin Nikolaevitch Koshelev; Vladimir Mihailovitch Krivtsun

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Konstantin Nikolaevitch Koshelev

Russian Academy of Sciences

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