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Dive into the research topics where Li Yuling is active.

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Featured researches published by Li Yuling.


asia pacific microwave conference | 2015

Low temperature Si-Si bonding process design based on plasma surface treatment

Wang Xiaoguang; Li Yuling; Qi Hong

Focused on the plasma pretreatment process, low temperature silicon-silicon bonding process is designed under a variety of atmosphere. Strength stable silicon-silicon bonding without annealing cavities is realized. Leak rate of samples is less than 1.0×10-10Pa · m3 / s, the bonding strength is greater than 20MPa / m3, is very close to the strength of the bulk silicon. This process is able to satisfy the application requirements in MEMS, semiconductor and MMIC.


Archive | 2013

Capacitive high polymer humidity sensor with micron gridded porous electrode and manufacturing method thereof

Jin Jiandong; Zheng Li; Qi Hong; Li Yuling; Wang Ping; Wang Mingwei; Tian Lei; Si Liangyou; Wang Chengyang


Archive | 2015

Silicon micro-resonance mode pressure sensor core and manufacturing method

Wu Yalin; Jin Jiandong; Wang Mingwei; Li Yuling; Tian Lei; Wu Zifeng; Liu Zhihui; Wang Yonggang


Archive | 2014

Manufacturing method of anti-overload micro-pressure sensor with arc stress-homogenizing structure

Wang Yonggang; Tian Lei; Jin Jiandong; Wang Mingwei; Li Haibo; Liu Zhihui; Yin Yanzhao; Wang Xiaoguang; Li Yuling; Mao Hongqing


Archive | 2017

Novel board -like gas sensitive component of low -grade fever

Wang Chengyang; Jin Jiandong; Wu Yalin; Li Yuling; Ding Wenbo; Wang Mingwei; Qi Hong; Liu Zhihui; Song Erdong; Zhao Ruikun


Yibiao Jishu yu Chuanganqi | 2016

Preparation and Characteristic Analysis of Sensitive Thin Film Resistor in Flow Sensor

Qi Hong; Li Yuling; Wang Xiaoguang; Zhang Yan; Kou Wenbing


Yibiao Jishu yu Chuanganqi | 2016

流量センサにおける敏感な薄膜抵抗の調製とその特性解析【JST・京大機械翻訳】

Qi Hong; Li Yuling; Wang Xiaoguang; Zhang Yan; Kou Wenbing


Archive | 2016

Novel micro-hotplate type gas sensing element

Wang Chengyang; Jin Jiandong; Wu Yalin; Li Yuling; Ding Wenbo; Wang Mingwei; Qi Hong; Liu Zhihui; Song Erdong; Zhao Ruikun


Archive | 2016

Integrated temperature and humidity sensor's silica -based gas sensitive chip

Wang Chengyang; Jin Jiandong; Li Yuling; Ding Wenbo; Qi Hong; Tian Lei; Wang Mingwei; Xia Lu; Zheng Li; Wang Yabin


Chuanganqi yu Weixitong | 2016

加速度センサの感度チップの性能に影響する因子とそのシミュレーション解析を統合した。【JST・京大機械翻訳】

Qi Hong; Wang Mingwei; Ding Wenbo; Li Yuling; Wang Xiaoguang

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Zhang Yan

Tianjin University of Traditional Chinese Medicine

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