Lianzhong Yu | Researchain

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Publication

Featured researches published by Lianzhong Yu.

Archive | 1999

Micro machined mirror

Duli Yu; Lianzhong Yu; Howard D. Goldberg; Martin A. Schmidt; Robert P Ried

Archive | 2005

High performance MEMS packaging architecture

Peter H. LaFond; Lianzhong Yu

Archive | 2001

Accelerometer with folded beams

Arjun Selvakumar; Duli Yu; Lianzhong Yu; Ben W. Jones

Archive | 2001

Dual axis micro machined mirror device

Duli Yu; Lianzhong Yu; Howard D. Goldberg; Martin A. Schmidt

Archive | 2006

MEMS vertical comb drive with improved vibration performance

Peter H. LaFond; Lianzhong Yu

Archive | 2005

Vibrating beam accelerometer two-wafer fabrication process

Lianzhong Yu

Archive | 2005

Vibrating beam accelerometer

Lianzhong Yu

Archive | 2006

Method of making dimple structure for prevention of MEMS device stiction

Lianzhong Yu; Ken L. Yang

Archive | 2000

Integrated and multi-axis sensor assembly and packaging

Larry Rushefsky; Axel Sigmar; Howard D. Goldberg; W Marc Stalnaker; Ray Rinne; Demetrios Balderes; Guido Lemke; Matthew Ip; Lawrence P. Behn; Klaus Domagalski; Lianzhong Yu; Arjun Selvakumar; Duli Yu; James L. Marsh; Peter Maxwell; David Morgan; Thomas Buie; Kees Faber; Sjoerd Altman; Richard Laroo

Archive | 2000