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Liu Jianpeng

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Publication

Featured researches published by Liu Jianpeng.

Archive | 2013

Method for calibrating ellipsometer with phase compensator

Xu Peng; Wang Linzi; Liu Tao; Liu Jianpeng; Li Guoguang

Archive | 2013

Calibration method of ellipsometer

Xu Peng; Liu Tao; Wang Linzi; Liu Jianpeng; Li Guoguang

Archive | 2014

Wafer stress measuring method

Li Chengmin; Liu Jianpeng; Yan Dong; Ye Longmao; Shen Yaqin; Wang Linzi; Jiao Hongda

Archive | 2014

Auxiliary temperature calibration device for reaction cavity of semiconductor film

Li Chengmin; Yan Dong; Wang Linzi; Liu Jianpeng; Zhang Tang; Ma Xiaochao

Archive | 2015

Device and method for detecting epitaxial wafer temperatures online in real time

Yan Dong; Li Chengmin; Wang Linzi; Liu Jianpeng; Ye Longmao

Archive | 2015

MOCVD reaction chamber temperature measurement method

Yan Dong; Li Chengmin; Wang Linzi; Liu Jianpeng; Jiao Hongda; Zhang Tang; Ma Xiaochao

Archive | 2014

Auxiliary temperature correction method of semiconductor thin-film reaction chamber

Li Chengmin; Yan Dong; Wang Linzi; Liu Jianpeng; Zhang Tang; Ma Xiaochao

Archive | 2016

Single-lens device for detecting two-dimensional morphology and temperature of water substrate

Liu Jianpeng; Zhang Tang; Zhang Lifang; Sang Yungang; Jiao Hongda

Archive | 2016

Single photon imaging detector and manufacturing method thereof

Li Chengmin; Yan Dong; Liu Jianpeng; Liu Tao

Archive | 2016

Device for detecting two-dimensional morphology of wafer substrate

Liu Jianpeng; Zhang Tang; Jiao Hongda; Zhang Lifang; Sang Yungang

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