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Liu Yao

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Publication

Featured researches published by Liu Yao.

Archive | 2017

MEMS device and preparation method thereof, electronic device

Liu Yao; Chen Fucheng; Shi Linbo

Archive | 2017

Semiconductor device, preparation method of semiconductor device, and electronic device

Liu Yao; Chen Fucheng

Archive | 2017

Method of realizing photoetching of rewiring metal layer

Liu Yao; Chen Fucheng

Archive | 2017

Bonding pad structure, welding ring structure and packaging method for MEMS (Micro-Electro-Mechanical Systems) device

Chen Fucheng; Shi Linbo; Liu Yao

Archive | 2016

A semiconductor device, a preparing method thereof and an electronic device thereof

Liu Yao; Chen Fucheng; Shi Linbo

Archive | 2016

Method for measuring vacuum degree of bonded cavity

Liu Yao; Chen Fucheng

Archive | 2016

Formation method of three-dimensional packaging structure

Chen Fucheng; Liu Yao; Shi Linbo

Archive | 2016

Method for improving photoresist morphology through repetitive exposure

Liu Yao; Chen Fucheng

Archive | 2016

MEMS device, preparation method and electronic apparatus

Liu Yao; Chen Fucheng

Archive | 2016

Wafer thinning method

Shi Linbei; Chen Fucheng; Liu Yao

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Collaboration

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