M. A. Larotonda

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.

Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum

We report saturated operation of an 18.9-nm laser at 5-Hz repetition rate. An amplification with a gain-length product GL of 15.5 is obtained in the 4d 1S0-4p 1P1 laser line of Ni-like Mo in plasmas heated at grazing incidence with approximately 1-J pulses of 8.1-ps duration from a tabletop laser system. Lasing is obtained over a broad range of time delays and pumping conditions. We also measure a GL of 13.5 in the 22.6-nm transition of the same ion. The results are of interest for numerous applications requiring high-repetition-rate lasers at wavelengths below 20 nm.

Large area high efficiency broad bandwidth 800 nm dielectric gratings for high energy laser pulse compression.

We have demonstrated broad bandwidth large area (229 mm × 114 mm) multilayer dielectric diffraction gratings for the efficient compression of high energy 800 nm laser pulses at high average power.

High repetition rate operation of saturated tabletop soft x-ray lasers in transitions of neon-like ions near 30 nm

We report average powers exceeding 1 microwatt in laser transitions of Ne-like ions at wavelengths near 30 nm. Gain-saturated operation was obtained at a repetition rate of 5 Hz exciting solid targets with pump pulses of ~1 J energy and 8 ps duration impinging at grazing incidence of 20 degrees. Gain-length products of about 20 were obtained in the 30.4 nm and 32.6 nm transitions of Ne-like V and Ne-like Ti respectively. Strong lasing was also observed in Ne-like Cr at 28.6 nm and in the 30.1 nm line of Ne-like Ti.

Characteristics of a saturated 18.9-nm tabletop laser operating at 5-Hz repetition rate

We report the characteristics of a saturated high-repetition rate Ni-like Mo laser at 18.9 nm. This table-top soft X-ray laser was pumped at a 5-Hz repetition rate by 8-ps 1-J optical laser pulses impinging at grazing incidence into a precreated Mo plasma. The variation of the laser output intensity as a function of the grazing incidence angle of the main pump beam is reported. The maximum laser output intensity was observed for an angle of 20/spl deg/, at which we measured a small signal gain of 65 cm/sup -1/ and a gain-length product g/spl times/l>15. Spatial coherence measurements resulting from a Youngs double-slit interference experiment show the equivalent incoherent source diameter is about 11 /spl mu/m. The peak spectral brightness is estimated to be of the order of 1/spl times/10/sup 24/ photons s/sup -1/ mm/sup -2/ mrad/sup -2/ within 0.01% spectral bandwidth. This type of practical, small scale, high-repetition soft X-ray laser is of interest for many applications.

Pulse duration measurements of grazing-incidence-pumped high repetition rate Ni-like Ag and Cd transient soft x-ray lasers.

We have measured the pulse duration of gain-saturated 13.9 nm Ni-like Ag and 13.2 nm Ni-like Cd transient collisional lasers excited by grazing-incidence-pumping for several pumping conditions. High-resolution streak-camera measurements yielded FWHM pulse durations close to 5 ps for both lasers under optimum pumping conditions. The very high brightness and short pulse duration of these new high repetition tabletop soft x-ray lasers make them an attractive source for dynamic applications.

Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets

We have generated a laser average output power of 2 microW at a wavelength of 13.9 nm by operating a tabletop laser-pumped Ni-like Ag laser at a 5 Hz repetition rate, using a solid helicoidal target that is continuously rotated and advanced to renew the target surface between shots. More than 2 x 10(4) soft-x-ray laser shots were obtained by using a single target. Similar results were obtained at 13.2 nm in Ni-like Cd with a Cd-coated target. This scheme will allow uninterrupted operation of laser-pumped tabletop collisional soft-x-ray lasers at a repetition rate of 10 Hz for a period of hours, enabling the generation of continuous high average soft-x-ray powers for applications.

High repetition rate collisional soft X-ray lasers based on grazing incidence pumping

We discuss the demonstration of gain-saturated high repetition rate table-top soft X-ray lasers producing microwatt average powers at wavelengths ranging from 13.9 to 33 nm. The results were obtained heating a precreated plasma with a picosecond optical laser pulse impinging at grazing incidence onto a precreated plasma. This pumping geometry increases the energy deposition efficiency of the pump beam into the gain region, making it possible to saturate soft X-ray lasers in this wavelength range with a short pulse pump energy of only 1 J at 800-nm wavelength. Results corresponding to 5-Hz repetition rate operation of gain-saturated 14.7-nm Ni-like Pd and 32.6-nm line Ne-like Ti lasers pumped by a table-top Ti:sapphire laser are reported. We also discuss results obtained using a 1 /spl omega/1054-nm prepulse and 2 /spl omega/527-nm short pulse from a Nd:glass pump laser. This work demonstrates the feasibility of producing compact high average power soft X-ray lasers for applications.

Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition

Hafnium oxide (HfO2) is undoubtedly one of the most desirable high-index optical coatings for high power laser applications. One of the key goals in the fabrication of oxide films with high Laser Induced Damage Threshold (LIDT) is to minimize the number of film imperfections, in particular stoichiometric defects. For HfO2 films deposited by ion beam (reactive) sputtering (IBS) of a hafnium metal target, stoichiometry is controlled by the injection of molecular oxygen, either close to the substrate or mixed with the sputtering gas or some other combination. Good stoichiometry is important to reduce the density of unoxidized particles buried in the coatings, which affect the LIDT. This work evaluates the potential advantages of using pre-activation of oxygen in the IBS of HfO2, with special emphasis on its impact on LIDT and film stress. For the experiments, oxygen was activated by an independent plasma source and then introduced into a commercial IBS chamber. The optical properties of the films were characterized using spectrophotometry and ellipsometry. Their structural quality and composition were determined from x-ray diffraction and x-ray photoelectron emission spectroscopy. The stress was determined from interferometer measurements. For optimized conditions, 2.5 J/cm2 LIDT was measured on HfO2 films at λ=800 nm with 1 ps and 25 mJ pulses from a chirped amplification Ti:Sapphire laser. In the range of oxygen variations under consideration the effects on LIDT are shown to be minimal.

Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium: erratum

We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G ϫ L = 17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sap-phire laser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ϳ1 mW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications. There is significant interest in the development of compact high-average-power soft-x-ray lasers for a variety of applications. In particular, there is a need for the development of compact coherent sources emitting at wavelengths within the bandwidth of the Mo–Si mirrors centered at 13.5 nm for at-wavelength metrology of extreme ultraviolet (EUV) projection lithography optics. 1 Laser amplification at this wavelength was demonstrated at a 2 – 3 Hz repetition rate in H-like Li ions following collisional recombination of completely ionized Li atoms in plasmas created by optical field ionization. 2,3 However, the maximum amplification reported to date for this laser excitation scheme, 4 a gain–length product of G ϫ L ϳ 6 – 7, is still insufficient to produce the laser output pulse energies and average powers required for most applications. Saturated laser operation at a repetition rate of one shot every several minutes has been obtained at 13.9 and 13.2 nm by transient collisional electron excitation of Ag and Cd targets with a combination of a nanosecond and picosecond laser pump pulses impinging in the direction normal to the target surface. In those experiments 5,6 the short-pulse pump energy was 3 – 7 J. Approaches investigated to reduce the pump energy necessary to produce saturated collisional lasers at wavelengths below 20 nm have included the use of longitudinal pumping. 7 In recent work 8–11 it was shown that the short-pulse pump energy required can be significantly decreased by directing this pump beam onto the target at a grazing angle ␪. This pumping geometry takes advantage of the refraction of the pump beam to increase the path length of the rays in the gain region of the plasma, thereby increasing the fraction of the pump energy absorbed in that region. 10 It is inherently a traveling wave, with a traveling wave pump speed v = c / cos ␪ (e.g., v = 1.09c at ␪ = 23°). Excitation of Mo …