M. Łukasiewicz

Zinc oxide for electronic, photovoltaic and optoelectronic applications

We show that the atomic layer deposition (ALD) technique has great potential for widespread use in the production of ZnO films for applications in electronic, photovoltaic (PV), and optoelectronic devices. The low growth temperature makes ALD-grown ZnO films suitable for fabrication of various semiconductor/organic hybrid structures. This opens up the possibility of novel devices based on very cheap organic materials, including organic light emitting diodes and third-generation PV cells.

ZnO, ZnMnO and ZnCoO films grown by atomic layer deposition

Despite many efforts, the origin of a ferromagnetic (FM) response in ZnMnO and ZnCoO is still not clear. Magnetic investigations of our samples, not discussed here, show that the room temperature FM response is observed only in alloys with a non-uniform Mn or Co distribution. Thus, the control of their distribution is crucial for the explanation of contradicted magnetic properties of ZnCoO and ZnMnO reported till now. In this paper, we discuss advantages of the atomic layer deposition (ALD) growth method, which enables us to control the uniformity of ZnMnO and ZnCoO alloys. Properties of ZnO, ZnMnO and ZnCoO films grown by the ALD are discussed.

ZnCoO Films by Atomic Layer Deposition - Influence of a Growth Temperature οn Uniformity of Cobalt Distribution

We report on the structural, electrical and magnetic properties of ZnCoO thin films grown by Atomic Layer Deposition (ALD) method using reactive organic precursors of zinc and cobalt. As a zinc precursor we applied either dimethylzinc or diethylzinc and cobalt (II) acetyloacetonate as a cobalt precursor. The use of these precursors allowed us the significant reduction of a growth temperature to 300oC and below, which proved to be very important for the growth of uniform films of ZnCoO. Structural, electrical and magnetic properties of the obtained ZnCoO layers will be discussed based on the results of SIMS, SEM, EDS, XRD, AFM, Hall effect and SQUID investigations.