M.M. Hasan

Structural, Optical and Morphological Properties of TiO2/Ag/TiO2 Multilayer Films

In this investigation, TiO2/Ag/TiO2 multilayer‐films were deposited on microscope glass slides with varying individual layer thicknesses by radio‐frequency reactive magnetron sputtering. Prior to multilayer development, single layers of Ag and TiO2 were deposited and characterized. All the films were prepared at a moderately high pressure at room temperature. It was found that single layer of TiO2 showed anatase polycrystalline structure. It also exhibited high visible transmittance of above 80% and higher refractive index of 2.31 at a wavelength of 550 nm. The indirect optical band gap of the TiO2 films was estimated as 3.39 eV. The Ag single layer films were found to be crystalline with a very high reflectance for IR (Infra‐red) light. Finally, the multilayers have been deposited and characterized by X‐ray diffraction, UV‐visible‐IR spectrophotometry, scanning electron microscopy and profilometry.