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Ma Xu

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Publication

Featured researches published by Ma Xu.

Archive | 2013

Light source-mask mixed optimizing method based on Abbe vector imaging model

Ma Xu; Li Yanqiu; Han Chunying; Dong Lisong

Archive | 2014

Source mask polarization optimization method based on Abbe vector imaging model

Ma Xu; Li Yanqiu; Han Chunying; Dong Lisong; Gao Jie

Archive | 2013

Optimization method of optical proximity effect correction based on Abbe vector imaging model

Ma Xu; Li Yanqiu; Dong Lisong

Archive | 2013

Method for optimizing three-dimension phase-shifting mask (PSM) based on boundary layer (BL) model

Ma Xu; Gonzalve Arce; Li Yanqiu

Archive | 2015

Extreme ultraviolet lithography light source-mask joint optimization method

Ma Xu; Chen Xuanbo; Wang Jie; Li Yanqiu

Archive | 2014

Light-source optimization method adopting compressed sensing technology

Ma Xu; Song Zhiyang; Gao Jie; Li Yanqiu

Archive | 2013

Basic module-based mask main body graph optimization method

Ma Xu; Li Yanqiu; Song Zhiyang

Archive | 2013

Basic module-based mask auxiliary graph optimizing method

Ma Xu; Li Yanqiu; Song Zhiyang

Archive | 2012

Method for optimizing two-phase phase shift mask based on generalized wavelet penalty function

Ma Xu; Li Yanqiu; Dong Lisong

Archive | 2017

Position and posture estimation method based on signal station

Ma Xu; Zhao Xuejiao; Wang ZhiQiang; Li Yanqiu

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Collaboration

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