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Makoto Kadoguchi

Kobe Steel

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Publication

Featured researches published by Makoto Kadoguchi.

Archive | 1999

Apparatus for high-temperature and high-pressure treatment

Takao Fujikawa; Takahiko Ishii; Yutaka Narukawa; Makoto Kadoguchi

Archive | 1999

Method of forming interconnect film

Takao Fujikawa; Makoto Kadoguchi; Kohei Suzuki; Yasushi Mizusawa; Tomoyasu Kondou; Yoji Taguchi

Archive | 2000

Method and device for high-temperature, high-pressure treatment of semiconductor wafer

Takao Fujikawa; Yutaka Narukawa; Tsuneharu Masuda; Makoto Kadoguchi

Archive | 2002

High-temperature and high-pressure treatment device

Takao Fujikawa; Yoichi Inoue; Yutaka Narukawa; Takahiko Ishii; Tsuneharu Masuda; Makoto Kadoguchi; Yoshihiko Sakashita

Archive | 2002

Method of forming a wiring film by applying high temperature/high pressure

Takao Fujikawa; Makoto Kadoguchi; Kohei Suzuki; Takuya Masui

Archive | 2000

Pressure processing apparatus for semiconductors

Takao Fujikawa; Takahiko Ishii; Tsuneharu Masuda; Makoto Kadoguchi; Yutaka Narukawa

Archive | 1999

Copper connection film, e.g. for an ultra large scale integration, is produced by high pressure grain growth heat treatment of a deposited film while suppressing pore formation

Takao Fujikawa; Makoto Kadoguchi; Kohei Suzuki; Yasushi Mizusawa; Tomoyasu Kondou; Yoji Taguchi

Archive | 1999

Method of forming metal wiring film

Takao Fujikawa; Takahiko Ishii; Yutaka Narukawa; Makoto Kadoguchi; Yasushi Mizusawa; Tomoyasu Kondou; Yuji Taguchi

Archive | 2001

High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method

Yutaka Narukawa; Makoto Kadoguchi

Archive | 1999

Verfahren zur Bildung eines Verbindungsfilmes

Takao Fujikawa; Makoto Kadoguchi; Kohei Suzuki; Yasushi Mizusawa; Tomoyasu Kondou; Yoji Taguchi

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Collaboration

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Takao Fujikawa

Kobe Steel

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Yutaka Narukawa

Kobe Steel

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Kohei Suzuki

Kobe Steel

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Takahiko Ishii

Kobe Steel

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Tomoyasu Kondou

Kobe Steel

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Yasushi Mizusawa

Kobe Steel

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Tsuneharu Masuda

Kobe Steel

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Yoji Taguchi

Kobe Steel

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Takuya Masui

Kobe Steel

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Yoichi Inoue

Kobe Steel

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