Mamoru Aizawa

Sol-gel formation of ITO thin film from a sol including ITO powder

Recently, low temperature synthesis of ITO thin film of low resistivity is desired in the field of LCD (Liquid Crystalline Display) production. This paper describes the results of experiment to produce ITO thin film from a sol containing crystalline ITO particles and alkoxides of In and Sn. Crystallization temperature of ITO thin film obtained from the sol mixed with ITO powder was lower than that of ITO from the sol without ITO powder. Furthermore, the resistivity of the former ITO thin film was lower than that of the latter. It was assumed that these results were attributed to the promotion effect of ITO crystalline particles to crystalize the amorphous ITO gel at lower temperature. This low temperature crystallization effect plays an important role in enhancing the crystallinity and electric conductivity of ITO thin film from sol-gel process.

Preparation of Spherical Hydrous Silica Oxide Particles under Acidic Condition via Sol-Gel Processing

Preparation of spherical hydrous silica oxide particles via sol-gel processing was rarely reported. In this study, spherical silica particles were obtained in TEOS/AcOEt/AcOH 50% aq. system. The combination of AcOEt and AcOH 50% aq. widened the spherical particle-forming region. Their size ranged from some ten micrometers to some hundreds micrometers. Hydrophilic molecules or powders like Rhodamine 6G and phosphorescent powders were encapsulated in the spherical particles.