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Featured researches published by Manabu Toguchi.


IFAC Proceedings Volumes | 1994

Development of a gravity center position controlled manipulator with using a redundant degree of freedom

Akira Torige; Jun-ichi Sugimoto; Manabu Toguchi; Noriaki lshizawa

Abstract In this paper, we proposed a manipulator system with control of the horizontal gravity center position to decrease the torque to tumble. To add a redundant degree of freedom with a manipulator, it changes its configuration continuously with the steady position of the hand and the horizontal position of gravity center moves continuously too. To Choose the configuration that the horizontal gravity center position of the manipulator is located on the base of the manipulator, the torque to tumble the manipulator is decrease to zero We made a prototype of this manipulator and certified the availability of this manipulator.


Archive | 2006

Exposure Apparatus, Exposure Method, and Producing Method of Microdevice

Masaki Kato; Kenji Shimizu; Manabu Toguchi; Tomoyuki Watanabe


Archive | 2006

Exposure device, exposure method, and micro device manufacturing method

Masaki Kato; Kenji Shimizu; Manabu Toguchi; Tomoyuki Watanabe


Archive | 1997

Exposure method, exposure apparatus, and mask

Makoto Tsuchiya; Kei Nara; Nobutaka Fujimori; Manabu Toguchi; Masami Seki


Archive | 1997

Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system

Manabu Toguchi; Kei Nara; Masaichi Murakami; Nobutaka Fujimori; Toshio Matsuura


Archive | 2001

Scanning exposure method and system

Masaichi Murakami; Masaki Kato; Katsuya Machino; Manabu Toguchi


Archive | 2010

OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Yasuo Aoki; Tomohide Hamada; Hiroshi Shirasu; Manabu Toguchi


Archive | 1995

Method of measuring orthogonality of stage unit

Tadaaki Shinozaki; Manabu Toguchi; Kunihiro Kawae; Kazuo Murano


Archive | 2010

Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method

Yasuo Aoki; Tomohide Hamada; Hiroshi Shirasu; Manabu Toguchi


Archive | 1999

Method of dividing and exposing patterns

Manabu Toguchi

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