Marc Wilhelmus Gijsbert Ponjee

New applications for LTPS array technology including lab‐on‐chip and MEMS actuators

— The use of low-temperature poly-Si technology for new applications beyond displays is presented. These applications include lab-on-chip, MEMS actuators, and sensors. As a key example, the use of high-voltage poly-Si TFTs for rapid heating and temperature control, as is required for DNA amplification within lab-on-chip, is described in detail. Other examples given include MEMS ink-jet printer heads and the formation of photosensors and impedance sensors for optical and electronic input, which can be used not only in displays and lab-on-chip, but also for new applications such as fingerprint sensing and particle counting.