Marcus Herrmann

60.4: Distinguished Paper: A Fully Integrated 1″ AMOLED Display Using Current Feedback Based on a Five Mask LTPS CMOS Process

Based on our five mask LTPS CMOS process we have developed a fully integrated 1″ AMOLED demonstrator with current feedback pixel circuits. One LTPS operational amplifier per column is used together with switched capacitors for digital analog conversion and current control.

Low temperature processes for metal-oxide thin film transistors

Processes for realizing ohmic drain/source contacts and a multilayer dielectric for sputtered amorphous oxide thin film transistors with high throughput at 160°C combined with a back-channel etch process have been demonstrated. These transistors achieve a carrier mobility of 8.6 cm2/Vs, a subthreshold slope of 0.18 V/dec, threshold voltage of 2.54 V and on/off ratio above 107. The chosen backchannel etch approach can also be extended to be used with drain/source metals such as molybdenum or copper.